Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning

Abstract

We propose two novel methods to effectively utilize parylene C films. First, we demonstrate a vertical deposition method capable of depositing a parylene C film of the same thickness on both sides of a sample. Through this method, we have formed parylene C films with a thickness of 4 μm on both sides of the sample with a thickness deviation of less than 2.5%. Further optical verification indicates that parylene C films formed by this method have a very uniform thickness distribution on each side of the surfaces. Second, we propose a debris-tolerant laser patterning method as a mask-less means to fabricate self-supporting ultrathin parylene C films. This method does not involve any photolithography and entails a simple and rapid process that can be performed using only a few materials with excellent biocompatibility. It is demonstrated that patterned parylene C films exhibit a high degree of surface uniformity and have various geometrical shapes so that they can be used for substrates of highly flexible and/or stretchable devices. Finally, we use both of the proposed methods to fabricate flexible, stretchable, and waterproof-packaged bifacial blue LED modules to illustrate their potential in emerging applications that would benefit from such versatile form factors.

Vapor-Deposited Polymer Films and Structure: Methods and Applications

“…Coclite et al used initiated plasma enhanced chemical vapor deposition(iPECVD) of an organosilicon polymer (1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane (TVTSO) monomer) to planarize silicon substrates and demonstrated that when the organic thin film is 1.8 nm thick, a 99% degree of global planarization could be achieved. 108 For graphene film growth by atmospheric pressure CVD on copper foil, the final graphene film's homogeneity and electronic transport properties were found to be strongly influenced by the surface morphology of the Cu substrate and the concentration of carbon feedstock gas, as reported by Luo et al 110 Template for Organic Materials Thieme 107 (Reproduced from Ref. [107] with permission.…”

“…108 For graphene film growth by atmospheric pressure CVD on copper foil, the final graphene film's homogeneity and electronic transport properties were found to be strongly influenced by the surface morphology of the Cu substrate and the concentration of carbon feedstock gas, as reported by Luo et al 110 Template for Organic Materials Thieme 107 (Reproduced from Ref. [107] with permission. Copyright 2022 Springer Nature.)…”

“…30 In another study, Sim et al used vertical deposition of parylene to fabricate a parylene C thin film on both sites of the substrate simultaneously with the same and uniform thickness. 107 Profiling thin films is also important to achieve an understanding of the thin film characteristics. Chen et al…”

“…Figure 1 Schematic diagram of the fundamental physical properties of thin films. (A) Schematic diagram of the two-sided deposition of parylene C onto a silicon wafer substrate with vertical deposition 107. (Reproduced from Ref [107].…”

“…(A) Schematic diagram of the two-sided deposition of parylene C onto a silicon wafer substrate with vertical deposition 107. (Reproduced from Ref [107]. with permission.…”