“…Therefore, relative humidity sensor-based respiration monitoring is less affected by the environmental conditions as compared to the mechanical sensors, conventional air flow meters and thermal sensors. Generally, there are various kinds of humidity sensors, such as optical fibers [ 7 , 8 , 9 ], capacitance [ 10 , 11 , 12 , 13 , 14 ], impedance [ 13 , 14 , 15 , 16 , 17 , 18 ], piezoelectric [ 19 ], surface acoustic wave (SAW) [ 20 , 21 , 22 ], and bulk acoustic wave (BAW) [ 23 , 24 , 25 ]. Among them, film bulk acoustic resonator (FBAR), a typical BAW, has gained wide attention in recent years due to their merits such as high sensitivity, high stability and fast response.…”