SIMS Performed on Focused Ion Beam Instruments : In-situ Correlative Structural and Chemical Imaging

Audinot, Jean-Nicolas; Øst, Alexander; Stoffels, Charlotte; Philipp, Patrick; Castro, Olivier De; Biesemeier, Antje; Hoang, Hung Quang; Wirtz, Tom

doi:10.1017/s1431927622001039

Cited by 3 publications

(1 citation statement)

References 8 publications

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“…ZEISS has emerged as a trailblazer through its exceptional strides in the development of Focused Ion Beam SIMS (FIB-SIMS) [23], contributing significantly to the intricate characterization of materials at the nanoscale. This imaging mode SIMS coupled with FIB was based on the development of the Luxembourg Institute of Technology SIMS [24][25][26], which currently lacks high mass accuracy and wide mass range.…”

Section: Introductionmentioning

confidence: 99%

Secondary Ion Mass Spectral Imaging of Metals and Alloys

Shen,

Howard,

2024

Materials

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Secondary Ion Mass Spectrometry (SIMS) is an outstanding technique for Mass Spectral Imaging (MSI) due to its notable advantages, including high sensitivity, selectivity, and high dynamic range. As a result, SIMS has been employed across many domains of science. In this review, we provide an in-depth overview of the fundamental principles underlying SIMS, followed by an account of the recent development of SIMS instruments. The review encompasses various applications of specific SIMS instruments, notably static SIMS with time-of-flight SIMS (ToF-SIMS) as a widely used platform and dynamic SIMS with Nano SIMS and large geometry SIMS as successful instruments. We particularly focus on SIMS utility in microanalysis and imaging of metals and alloys as materials of interest. Additionally, we discuss the challenges in big SIMS data analysis and give examples of machine leaning (ML) and Artificial Intelligence (AI) for effective MSI data analysis. Finally, we recommend the outlook of SIMS development. It is anticipated that in situ and operando SIMS has the potential to significantly enhance the investigation of metals and alloys by enabling real-time examinations of material surfaces and interfaces during dynamic transformations.

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