Simulated and experimental study of laser-beam-induced thermal aberrations in precision optical systems

Chen, Hua; Yang, Hang; Yu, Xilong; Shi, Zhenguang

doi:10.1364/ao.52.004370

Cited by 15 publications

(3 citation statements)

References 16 publications

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“…It has been shown previously that lasers with a high intensity focused to a narrow beam width can have a self induced birefringence [24][25][26]. Though the probe lasers seem far away from these extreme effects with typical beam widths of 2 mm, the power was varied from several mW down to a few hundred µW for both lasers.…”

Section: Errors Due To Laser Intensitymentioning

confidence: 99%

Limits on magnetically induced Faraday rotation from polarized He3 atoms

et al. 2019

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Faraday rotation has become a powerful tool in a large variety of physics applications. Most prominently, Faraday rotation can be used in precision magnetometry. Here we report measurements of gyromagnetic Faraday rotation on a dense, hyperpolarized 3 He gas target. Theoretical calculations predict the rotations of linearly polarized light due to the magnetization of spin-1/2 particles are on the scale of 10 −7 radians. To maximize the signal, a 3 He target designed to use with a multipass cavity is combined with a sensitive apparatus for polarimetry that can detect optical rotations on the order of 10 −8 radians. Although the expected results are well above the sensitivity for the given experimental conditions, no nuclear-spin induced rotation was observed.

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Section: Errors Due To Laser Intensitymentioning

confidence: 99%

Limits on magnetically induced Faraday rotation from polarized He3 atoms

et al. 2019

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“…Active optics is introduced to compensate time-changing thermal aberrations, especially the non-rotationally symmetrical astigmatism which mainly appears in dipole illumination mode. In this type of illumination mode, the lens elements present nonuniform distributed temperature which causes non-rotationally symmetrical deformation and inhomogeneous refractive index, thus time-changing non-rotational symmetrical aberrations like astigmatism occur [7]. Active real-time dynamic compensation is the only means to compensate this type of aberration.…”

Section: Introductionmentioning

confidence: 99%

Simulation Research on the Thermal Effects in Dipolar Illuminated Lithography

Yao

Gong

2016

Journal of the Optical Society of Korea

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The prediction of thermal effects in lithography projection objective plays a significant role in the real-time dynamic compensation of thermal aberrations. For the illuminated lithography projection objective, this paper applies finite element analysis to get the temperature distribution, surface deformation and stress data. To improve the efficiency, a temperature distribution function model is proposed to use for the simulation of thermal aberrations with the help of optical analysis software CODE V. SigFit is approved integrated optomechanical analysis software with the feature of calculating OPD effects due to temperature change, and it is utilized to prove the validation of the temperature distribution function. Results show that the impact of surface deformation and stress is negligible compared with the refractive index change; astigmatisms and 4-foil aberrations dominate in the thermal aberration, about 1.7 λ and 0.45 λ. The system takes about one hour to reach thermal equilibrium and the contrast of the imaging of dense lines get worse as time goes on.

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“…As a result of laser absorption, lens heating, which leads to temperature rise and inhomogeneous thermal distribution, results in thermal elastic deformation, refractive index change, and thermal stress [2][3][4]. Among these three main reasons, refractive index change caused by inhomogeneous thermal distribution is a dominating factor for projection lens performance degeneration [4,5].…”

Section: Introductionmentioning

confidence: 99%

Analysis and experiments of the thermal–optical performance for a kinematically mounted lens element

Zhang

et al. 2014

Appl. Opt.

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In order to evaluate the thermal-optical performance of a kinematic mounting applied in lithographic projection lens, the optical surface figure and wavefront changes of the lens element under a certain thermal load are investigated with both experimental and numerical simulation methods. From the experimental and numerical results, the temperature on the edge of the lens element rises up to 22.51°C, and the center of lens is 5.3°C higher. As a result, this thermal nonuniformity leads to a 9.622 nm RMS change of the optical surface figure and 71.905 nm RMS change of the index inhomogeneity, consisting mainly of Z4, Z9, and Z16. Because of the radial flexibility of the supporting legs of the kinematic mounting, aberrations such as pri trefoil and sec trefoil are less than 2% of the total wavefront changes, and other nonaxisymmetric aberrations are negligible. The Zernike coefficient differences between experiments and simulation are less than 2 nm, which supports the correctness of our method. The kinematic mounting shows good thermal adaptability, and the method for evaluation of the thermal-optical characteristics is proved effective.

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Simulated and experimental study of laser-beam-induced thermal aberrations in precision optical systems

Cited by 15 publications

References 16 publications

Limits on magnetically induced Faraday rotation from polarized He3 atoms

Limits on magnetically induced Faraday rotation from polarized He3 atoms

Simulation Research on the Thermal Effects in Dipolar Illuminated Lithography

Analysis and experiments of the thermal–optical performance for a kinematically mounted lens element

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