Simulation analysis on absolute testing of spherical

Weihong, 宋伟红 Song; Fan, 伍凡 Wu; Xi, 侯溪 Hou; Peng, 杨鹏 Yang

doi:10.3788/hplpb20112312.3229

Cited by 1 publication

(2 citation statements)

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“…As a result, the missing kNθ variations of surface deviation are determined by Eq. (7). And the rotationally asymmetric surface deviation of test optic can be obtained by adding the W kNθ ρ; θ part of Eq.…”

Section: Theoretical Analysismentioning

confidence: 99%

“…Several absolute methods for measuring rotationally asymmetric part of a spherical surface have been proposed and developed, such as the single-rotation method [1][2][3][4][5], multiangle averaging method [6][7][8][9], and multi-independent series of measurements method [10,11]. The single-rotation method based on the single rotation of the test optics in the measurements can obtain the rotationally asymmetric surface deviations of test optics with the help of least-squares fitting of Zernike polynomials.…”

Section: Introductionmentioning

confidence: 99%

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Method to test rotationally asymmetric surface deviation with high accuracy

Song

Hou

2012

Appl. Opt.

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We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is ∼0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well.

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Section: Theoretical Analysismentioning

confidence: 99%