2023
DOI: 10.1177/09544054231210023
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Simulation and experimental research on the abrasive trajectories of plane lapping based on rotary swing drive

Jianhui Zhu,
Hang Gao,
Yuchun Xu
et al.

Abstract: In the pursuit of achieving exceptional surface shape accuracy for MPCVD (Microwave Plasma Chemical Vapor Deposition) polycrystalline diamond wafers during the free abrasive lapping process, plane lapping based on rotary swing drive was employed in this study. The crux of this study lay in the development of a comprehensive kinematic model, scrutinizing the motion behavior of abrasive particles, and probing the influence of parameters on the uniformity of abrasive trajectories. The results show that the eccent… Show more

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