Simulation and experimental validation of a selective magnetization process for batch-patterning magnetic layers

Velez, Camilo; Patterson, W. C.; Arnold, David P.

doi:10.1088/1742-6596/660/1/012006

Cited by 2 publications

(1 citation statement)

References 13 publications

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“…The most important aspect of the levitated microrobot fabrication is imprinting the magnetic pattern using selectivemagnetization [16] [17]. Because of the importance of the magnetization mask, this should be accomplished after defining geometry parameters, magnetization mask material and reversal field to be applied during the selective magnetization process (it varies with the mask and substrate material).…”

Section: Low Aspect Ratio Magnetization Maskmentioning

confidence: 99%

Batch-Fabrication of Diamagnetically Levitated Microrobots

Velez¹,

Pelrine²,

Arnold³

2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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This paper reports the batch fabrication of magnetically patterned bases for millimeter-scale, diamagnetically levitated microrobots. A selective-magnetization process is used to imprint checkerboard magnetic pole patterns in a single NdFeB substrate. Further machining of the substrate produces nine microrobots per batch (limited by the surface area of the magnetic substrate). This process represents a leap forward compared to the current fabrication approach, which relies on hand-assembly and gluing arrays of discrete magnets. The diamagnetic repelling forces of bases with two thickness (400 μm and 280 μm) are directly measured (227 μN and 64 μN), showing that the thicker base produced higher force. Furthermore, the microrobots are capable of assisted levitation (external magnetic field bias) and operation in sliding mode (lateral movement) using microfactory drive platform.

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Section: Low Aspect Ratio Magnetization Maskmentioning

confidence: 99%

Batch-Fabrication of Diamagnetically Levitated Microrobots

Velez¹,

Pelrine²,

Arnold³

2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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Direct measurement and microscale mapping of nanoNewton to milliNewton magnetic forces

2017

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This paper describes the direct measurement and mapping of magnetic forces/fields with microscale spatial resolution by combining a commercial microforce sensing probe with a thin-film permanent micromagnet. The main motivation of this work is to fill a critical metrology gap with a technology for direct measurement of magnetic forces from nN to 10’s of mN with sub-millimeter spatial resolution. This capability is ideal for measuring forces (which are linked to magnetic field gradients) produced by small-scale magnetic and electromagnetic devices including sensors, actuators, MEMS, micromotors, microfluidics, biomedical devices. This new measuring technique is validated by comparison of measured forces from small permanent magnets with the analytical models.

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Simulation and experimental validation of a selective magnetization process for batch-patterning magnetic layers

Cited by 2 publications

References 13 publications

Batch-Fabrication of Diamagnetically Levitated Microrobots

Batch-Fabrication of Diamagnetically Levitated Microrobots

Direct measurement and microscale mapping of nanoNewton to milliNewton magnetic forces

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