Simulation and microfabrication of polysilicon structures used as mass sensitive sensors for gas detection

Simulation and fabrication of SiO2-based piezoresistive microbridges for chem/biosensors

“…Microbridges have been fabricated from Si [6,8,10,18,[25][26][27], silicon carbide [28,29], silicon nitride [30], metals [31,32], metal composites [33] and polymers [34,35]. Resonant microbridge sensors made of polysilicon have been simulated and fabricated using typical micromachining techniques and integrated with on-chip electronics using the CMOS method [16,[36][37][38].…”