Simulation fabrication and characterization of micro-cantilever array based ozone sensor

Amiri, Iraj Sadegh; Addanki, Satish

doi:10.1016/j.rinp.2018.08.010

Cited by 10 publications

(11 citation statements)

References 34 publications

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“…The microcantilever with an enlarged clamped area was etched from an n-type SOI wafer, as shown in Figure 9 . The electrodes were separated by a layer of silicon oxide [ 45 ]. The device was functionalized by a 0.2 µm thick gold layer adhered to the surface by titanium [ 45 ].…”

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

“…The electrodes were separated by a layer of silicon oxide [ 45 ]. The device was functionalized by a 0.2 µm thick gold layer adhered to the surface by titanium [ 45 ]. The dimensions of the larger, clamped region of the suspended beam were 64.64 µm, 135.46 µm, and 1 µm for width, length, and thickness, respectively [ 45 ].…”

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

“…The device was functionalized by a 0.2 µm thick gold layer adhered to the surface by titanium [ 45 ]. The dimensions of the larger, clamped region of the suspended beam were 64.64 µm, 135.46 µm, and 1 µm for width, length, and thickness, respectively [ 45 ]. The thinner portion of the highest performing device in this work was 14.68 µm, 99.12 µm, and 1 µm for width, length, and thickness, respectively.…”

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

“…The thinner portion of the highest performing device in this work was 14.68 µm, 99.12 µm, and 1 µm for width, length, and thickness, respectively. The resonant frequency of the unperturbed resonator was reported as 334.75 kHz, which dropped to 334.4 kHz when exposed to an ozone concentration of 180 ppm in a 17250 cm 3 closed glass chamber [ 45 ].…”

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

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Capacitive Based Micromachined Resonators for Low Level Mass Detection

et al. 2020

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Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors’ performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

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Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

Section: Microcantilever Mass Sensorsmentioning

confidence: 99%

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Capacitive Based Micromachined Resonators for Low Level Mass Detection

et al. 2020

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“…In recent years, the development of micro processing and manufacturing technology has accelerated the research progress of nanomechanical sensors [1,2,3,4,5]. Nanomechanical sensors have been widely studied in biological, chemical, and environmental protection sensor applications because of their high sensitivity and capacity for integration [6,7,8].…”

Section: Introductionmentioning

confidence: 99%

Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

Jing

Fan

Wang

et al. 2019

Sensors

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This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure.

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Two-Dimensional Hydrodynamic Forces in an Array of Shape-Morphed Cantilever Beams

Devsoth

Pandey²

2022

Microactuators, Microsensors and Micromechanisms

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Simulation fabrication and characterization of micro-cantilever array based ozone sensor

Cited by 10 publications

References 34 publications

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

Two-Dimensional Hydrodynamic Forces in an Array of Shape-Morphed Cantilever Beams

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