Simulation methods for multipole imaging systems and aberration correctors

Determination of analytical expansion from numerical field data

“…(8) takes the form dS ¼ r dl dj. Substituting in (8), one can find the electrostatic potential in the form…”

“…The first one implemented by Munro et al was presented in [8,9]. It is based on the expansion of the axial function into a series of the Hermite functions [10].…”

Aberration analysis of electron mirrors by a differential algebraic method

“…The electric and magnetic fields are reconstructed from Hermite series fitting of the axial distribution functions extracted from the field computation. This is very accurate because series of Hermite functions are continuously differentiable and are especially suitable for field functions that tend to zero at faraway axial distances [8,11].…”

“…The axial potential function and the axial magnetic flux density distribution were obtained from our SOFEM software [12], which uses the second-order finite element method. Then these axial functions were fitted by Hermite series [8,11]. These data were fed into MIRROR_DA, and the optical properties and aberrations were calculated by the DA method.…”

Aberration correction past and present

“…For details, see Lencová & Zlámal (2005, 2007 and the SPOC website. The MEBS software is likewise capable of calculating the properties of a wide range of electron optical devices, surveyed with numerous illustrations in Liu et al (2002) and Munro et al (2006) and more recently in Liu et al (2008); cf. their distant ancestor (Munro 1973).…”