Abstract. Considering the difficulty to build a proper model from theoretical derivation, system identification is being applied greatly in practical engineering. In this paper, specific to ultrasonic motor (USM), a practical and effective method of identify the structure and parameter is introduced. By fitting the curve of transient process of USM amplitude step for different orders, an effective method for estimate the transfer function is also introduced. Accordingly, the system with three orders should be applied in engineering. The paper provides a proper method to identify the model of USM. However, in terms of other types of execute components; a large number of experiments are requested as well.