Simulation of an Inductive Discharge in Argon with the Gas Flow and Inhomogeneous Gas Temperature

Kropotkin, A. N.; Voloshin, Dmitry

doi:10.1134/s1063780x19070055

Cited by 6 publications

(1 citation statement)

References 37 publications

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“…The two-dimensional model used in this work has been described in detail elsewhere [6,7]. Next, we briefly describe the main points of this model without writing equations for brevity.…”

Section: Description Of the Modelmentioning

confidence: 99%

Numerical model of a gaseous inductive discharge in oxygen, taking into account the complete scheme of the vibrational kinetics of O2 molecules

Kropotkin,

Chukalovsky,

Kurnosov

et al. 2023

MTD

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In this work, the two-dimensional model of inductively coupled plasma discharge in oxygen was developed. The model includes hydrodynamic equations in drift-diffusion approximation for describing the kinetics of charged (electrons and ions) and neutral plasma particles, Maxwell’s equations for electromagnetic fields, and equations for the temperature and neutral gas flow as well as a detailed scheme of plasma-chemical reactions. The model was tested against theoretical and experimental data in a simple cylindrical chamber. The electron density and temperature distributions were obtained over a wide range of powers deposited in the plasma (100–500 W) and compared with literature data. Also, the complete scheme of the vibrational kinetics of O2 molecules was included in the model. The vibrational distribution function was calculated in low-pressure inductive discharge as well as spatial distributions of plasma parameters (density and temperature of electrons, excited components, neutral gas temperature, etc.) and flows of charged and active neutral particles at the reactor walls.

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“…The two-dimensional model used in this work has been described in detail elsewhere [6,7]. Next, we briefly describe the main points of this model without writing equations for brevity.…”

Section: Description Of the Modelmentioning

confidence: 99%

Numerical model of a gaseous inductive discharge in oxygen, taking into account the complete scheme of the vibrational kinetics of O2 molecules

Kropotkin,

Chukalovsky,

Kurnosov

et al. 2023

MTD

View full text Add to dashboard Cite

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ICP argon discharge simulation: The role of ion inertia and additional RF bias

Kropotkin

Voloshin

2020

Physics of Plasmas

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Inductively coupled plasma (ICP) argon discharge with additional RF bias on the electrode is studied numerically and compared with experimental data. The role of ion inertia is shown by comparing the two numerical approaches: drift-diffusion approximation and a separate equation for ion momentum in the model. Two different discharge geometries are studied: simple cylindrical geometry and two chambers geometry with a downstream plasma. The difference in the calculated plasma density is shown for lower pressure values. Two approaches give similar results at a pressure of 100 mTorr. The downstream ICP discharge with an additional 12 MHz bias was calculated for the range of voltage amplitude from 20 to 215 V. The ion energy distribution function at the RF-biased electrode is calculated by the kinetic model. The results are compared with experimentally measured plasma density and ion energy spectra in the two-chamber discharge geometry. A good agreement was obtained between the calculated and experimental data.

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Construction and validation of C3F8 electron impact and heavy particle reaction scheme for modeling plasma discharges

Kropotkin,

Voloshin

2024

Physics of Plasmas

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This work presents the results of developing a set of electronic and chemical reactions for a plasma discharge in octafluoropropane (C3F8). Electronic reactions were obtained using the most relevant set of cross sections at the moment, taking into account experimentally known dissociation and ionization channels. Based on the dissociation products obtained during electronic reactions, a set of chemical reactions was adapted by analogy with the C4F8 reaction scheme from the literature. Next, the resulting complete set of reactions was tested against published experimental data on the concentration of electrons, negative ions, and electronegativity in a capacitive plasma discharge at different gas pressures and discharge input powers. For this purpose, a one-dimensional hydrodynamic drift-diffusion model was used. Reasonable agreement was obtained between the model and experimental data on electronegativity. Eventually, the resulting set of reactions was adapted for a two-dimensional hydrodynamic drift-diffusion model of an ICP discharge. The results of the calculations are two-dimensional distributions of radicals and ions, radical and ion composition of fluxes onto the substrate under conditions typical for industrial reactors.

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Simulation of an Inductive Discharge in Argon with the Gas Flow and Inhomogeneous Gas Temperature

Cited by 6 publications

References 37 publications

Numerical model of a gaseous inductive discharge in oxygen, taking into account the complete scheme of the vibrational kinetics of O2 molecules

Numerical model of a gaseous inductive discharge in oxygen, taking into account the complete scheme of the vibrational kinetics of O2 molecules

ICP argon discharge simulation: The role of ion inertia and additional RF bias

Construction and validation of C3F8 electron impact and heavy particle reaction scheme for modeling plasma discharges

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