2016
DOI: 10.1116/1.4968548
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Simulation of atomic layer deposition on nanoparticle agglomerates

Abstract: Coated nanoparticles have many potential applications; production of large quantities is feasible by atomic layer deposition (ALD) on nanoparticles in a fluidized bed reactor. However, due to the cohesive interparticle forces, nanoparticles form large agglomerates, which influences the coating process. In order to study this influence, the authors have developed a novel computational modeling approach which incorporates (1) fully resolved agglomerates; (2) a self-limiting ALD half cycle reaction; and (3) gas d… Show more

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Cited by 8 publications
(6 citation statements)
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“…ALD technique is advantageous for uniform deposition of conformal coating with controllable thickness on CAM particles [195]. Mechanistic models based on analytical correlations [196,197], DFT [198][199][200], MD [201], MC [197,202], CFD [203] have been applied to investigate the ALD process. Whereas, DEM has been employed to model mechanofusion based dry particle coating [204][205][206].…”
Section: Particle Coatingmentioning
confidence: 99%
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“…ALD technique is advantageous for uniform deposition of conformal coating with controllable thickness on CAM particles [195]. Mechanistic models based on analytical correlations [196,197], DFT [198][199][200], MD [201], MC [197,202], CFD [203] have been applied to investigate the ALD process. Whereas, DEM has been employed to model mechanofusion based dry particle coating [204][205][206].…”
Section: Particle Coatingmentioning
confidence: 99%
“…The exposure time required to complete the coating increases with increasing aspect ratio of the cylindrical hole. This model was further modified for coating on agglomerates of nanoparticles [197]. Fluidized bed reactor based ALD coating of Al 2 O 3 on SiO 2 nanoparticles has been modeled though CFD and analytical correlations [203].…”
Section: Particle Coatingmentioning
confidence: 99%
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“…In another review [12], van Ommen comes to the disputable conclusion of NP-scale mixing having being achieved only in [16], due to microjets being superior to other fluidization assistance methods and the specific microjets from 127-508 µm nozzles being superior to microjets from larger bores. In a latter work from his group [26], sub-agglomerate mixing and dynamic reorganization are, indirectly, denied. Indeed, significant inhibition of ALD surface reactions is calculated by diffusion into large FB agglomerates made of large (90 nm) NPs, but such resistances would not exist in case of inner particles (or at least clusters) repeatedly becoming outer particles during the process.…”
Section: Introductionmentioning
confidence: 99%