Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning

Raptis, Ioannis; Patsis, G. P.

doi:10.1007/978-3-7091-0424-8_3

Nanofabrication 2011

DOI: 10.1007/978-3-7091-0424-8_3

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Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning

Ioannis Raptis

G. P. Patsis

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Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning

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References 94 publications

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