Simulation of electron solid interactions in NbC and NbN using Monte Carlo method

Abstract

A computer program has been developed using Rutherford's Screened Scattering Model and Energy loss model due to Bethe and applied to simulate the electron interaction pattern in the sample of NbC and NbN with a resist layer of PMMA (Polymethyl Methylacrylate). Using the program we have studied the extent of penetration, lateral spread for different electron energies and the degree of electron back scattering. It has been found that backscattering and lateral spread is more in case of NbC than in NbN signifying hard, refractory and ceramic properties of NbC.