Simulation of low-energy E-beam lithography

Abstract

An electrostatic kicker has been constructed for use in the Low-Energy Undulator Test Line (LEUTL) at the Advanced Photon Source (APS). The function of the kicker is to limit the amount of beam current to be accelerated by the APS Iinac. Two electrodes within the kicker create an electric field that adjusts the trajectory of the beam. This paper will explore the static fields that are set up between the offset electrode plates and determine the reaction of the beam to this field. The kicker was numerically simulated using the electromagnetic solver package MAFIA [1].