1997
DOI: 10.1143/jjap.36.5356
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Simulation of Monolithic Silicon LLL Scanning X-Ray Interferometer

Abstract: A model of a monolithic silicon LLL scanning X-ray interferometer capable of displacements up to 100 µm is described. It can be used for the measurement of the (220) lattice plane spacing of silicon in studies concerning the Avogadro constant and for the calibration of linear displacement transducers having sub-nanometer sensitivity.

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