Simulation of Perforated Diaphragms Employed Piezoresistive Pressure Sensor for Sensitivity Enhancement and Validation with Modified Analytical Model

Rajavelu, M.; Sivakumar, D.; Daniel, R. Joseph; Sumangala, K.

doi:10.1016/j.proeng.2012.06.404

Cited by 2 publications

(2 citation statements)

References 11 publications

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“…Equation (4) calculates the deflection as a part of the applied pressure and device dimension in addition to poisson's ratio and Young's modulus. For small scale deflection (y) can be written as given in equation (5) [6]. (4) Where (5) Here, P is the applied pressure 'L' is length of the membrane, 'h' is the thickness of the bossed beam-membrane, 'E' is the Young's modulus, and 'v' is the poisson's ratio.…”

Section: Theoretical Analysismentioning

confidence: 99%

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Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

Arjunan¹,

Shanmuganantham²

2017

Transactions on Electrical and Electronic Materials

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This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

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Section: Theoretical Analysismentioning

confidence: 99%

“…Using a clamped square diaphragm reduces bending rigidity. Adding perforations will increase sensitivity [6]. Silicon as the membrane material is well suited for detecting the burst pressure and linearity [8].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

Arjunan¹,

Shanmuganantham²

2017

Transactions on Electrical and Electronic Materials

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show abstract

A comprehensive survey on the research headway of piezoresistive diaphragms for micro electromechanical applications

2017

2017 International Conference on Intelligent Computing, Instrumentation and Control Technologies (ICICICT)

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Simulation of Perforated Diaphragms Employed Piezoresistive Pressure Sensor for Sensitivity Enhancement and Validation with Modified Analytical Model

Cited by 2 publications

References 11 publications

Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

Modeling and Analysis of a Multi Bossed Beam Membrane Sensor for Environmental Applications

A comprehensive survey on the research headway of piezoresistive diaphragms for micro electromechanical applications

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