Simulation of realistic speckle fields by using surface integral equation and multi-level fast multipole method

Fu, Liwei; Daiber-Huppert, Max; Frenner, Karsten

doi:10.1016/j.optlaseng.2022.107438

Cited by 4 publications

(3 citation statements)

References 36 publications

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“…In this research, a simulation tool based on the BEM method, accelerated through multilevel fast multipole method for aperiodic 3D structures, was utilized to simulate the RS-N grating structures for the comparison. 24 An essential difference between BEM and the other two methods, FMM and FEM applied for this research, is that BEM is for modeling 3D isolated structures, whereas the presented FMM and FEM are typically employed for analyzing 2D and 3D periodic structures. Thus, the grating calculated using BEM has a limited size in both the x-and y-directions, which is an aperiodic 3D object with open boundaries.…”

Section: Bem Methodsmentioning

confidence: 99%

Digital twins for 3D confocal microscopy

Hansen,

Pahl,

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

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We present three digital twins for microscopy capable of simulating the image formation, the back focal plane formation and the near-field of confocal microscopes. For this, the light-surface interaction and the near-field are simulated using three different rigorous methods, the finite element method, the Fourier modal method and the boundary element method. The back focal plane formation and the image formation are simulated using three different Fourier optics implementations. The microscope modelling is done for ideal optical components, but can be extended to non-ideal optical components if the details of the optical components are known. The three models provide high accuracy and advantages with respect to the computational effort as a full 3D model is applied to 2D structures and the lateral scanning process of the confocal microscope is considered without repeating the time consuming rigorous simulation of the scattering process. The accuracy of the models are proven by comparison of the methods.

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Section: Bem Methodsmentioning

confidence: 99%

Digital twins for 3D confocal microscopy

Hansen,

Pahl,

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

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“…To simulate the light-surface interaction the boundary element method (BEM) simulation tool SpeckleSim, provided by the ITO of the University of Stuttgart, is used. The simulation tool SpeckleSim solves the Maxwell equations numerically for large scale nonperiodic 3D surfaces with a realistic computation time and allows a physically correct modeling of more complex rough surface structures [1]. To see the differences of SpeckleSim to other simulation tools, a comparison between SpeckleSim, JCMsuite [2] and Ansys Lumerical [3] is made.…”

Section: Rigorous Maxwell Solvermentioning

confidence: 99%

Rigorous modeling of a confocal microscope

Wyss,

Krüger,

Grundmann

et al. 2023

Modeling Aspects in Optical Metrology IX

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A reliable tool for simulations of confocal microscopes shall be developed to enable improved model-based dimensional metrology. To simulate measurements on rough surfaces the boundary element method (BEM) simulation tool SpeckleSim, developed by the ITO of the University of Stuttgart, is combined with a Fourier optics based image formation. SpeckleSim, which calculates the light-structure interaction by solving the Maxwell equations, is compared with the well-known FEM based solver JCMsuite and the FDTD based solver Ansys Lumerical. As an example, a rectangular shaped line is used as an object. Due to different boundary conditions the results show as expected small deviations, which require further investigations. First comparison results and the general concept of the image formation method will be presented.

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“…However, with reduced size and increased complexity of structures, rigorous modeling becomes indispensable to deal with multi-scattering and polarization effects. In the past, we have developed a 3D modeling tool based on the surface integral equation (SIE) method, or alternatively boundary element method (BEM) [2]. Therein, the effective electrical and magnetic currents induced on the surface by the illumination are solved first, and then the scattered field in an arbitrary plane spatially separate from the surface is calculated.…”

Section: Scattering Modelmentioning

confidence: 99%

Simulation of light scattering from complex 3D structures for confocal microscope using accelerated boundary element method

Fu,

Birk,

Frenner

et al. 2023

Modeling Aspects in Optical Metrology IX

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Optical metrology faces significant challenges as functional devices continue to shrink in size due to new patterning processes for semiconductor chips. Consequently, there is a growing interest in modeling optical systems to achieve more accurate measurements and to compare measurements from different optical instruments, such as confocal microscopes, white light interference microscopes, and focus-varied microscopes. Previous models have employed either a thin layer approximation or 2D periodic structures to simulate light scattering. However, to accurately simulate more complex structures and compare them with experimental data, there is a need for a physically accurate modeling and simulation tool that can handle large-scale aperiodic 3D surfaces. To address this need, we have developed a simulation tool called SpeckleSim, which utilizes the boundary element method. By incorporating a multi-level fast multiple method, we are able to calculate light scattering from 3D nanostructures within a reasonable timeframe. In this report, we adapt the method to a confocal microscopy model and investigate the extent to which it can reproduce surface profiles for different types of structures. The obtained results will be compared with experimental measurements and the results from other rigorous simulation tools such as rigorous coupled wave analysis (RCWA) method.

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Simulation of realistic speckle fields by using surface integral equation and multi-level fast multipole method

Cited by 4 publications

References 36 publications

Digital twins for 3D confocal microscopy

Digital twins for 3D confocal microscopy

Rigorous modeling of a confocal microscope

Simulation of light scattering from complex 3D structures for confocal microscope using accelerated boundary element method

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