Simulation of resistive microwave resonator probe for high-pressure plasma diagnostics

Xu, Jing; Keji, Nakamura; Zhang, Qi; Sugai, Hideo

doi:10.1088/0963-0252/18/4/045009

Cited by 35 publications

(55 citation statements)

References 8 publications

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“…(Multi-port concepts would also be conceivable.) Many groups have dealt with simulation and modeling of specialized aspects of such diagnostic devices to achieve a better understanding of the resonance behavior [6,12,[19][20][21][22]. In contrast, the purpose of this manuscript is to study the whole class of active, electrostatic methods in order to gain a deeper physical understanding of the resonance behavior.…”

Section: Introductionmentioning

confidence: 99%

Active plasma resonance spectroscopy: a functional analytic description

Lapke

Oberrath

Mussenbrock

et al. 2013

Plasma Sources Sci. Technol.

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The term "Active Plasma Resonance Spectroscopy" denotes a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: A signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtain information on the electron density and other plasma parameters. In recent years, the concept has found renewed interest as a basis of industry compatible plasma diagnostics. This paper analyzes the diagnostics technique in terms of a general description based on functional analytic (or Hilbert Space) methods which hold for arbitrary probe geometries. It is shown that the response function of the plasma-probe system can be expressed as a matrix element of the resolvent of an appropriately defined dynamical operator. A specialization of the formalism to a symmetric probe design is given, as well as an interpretation in terms of a lumped circuit model consisting of series resonance circuits. We present ideas for an optimized probe design based on geometric and electrical symmetry.

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Section: Introductionmentioning

confidence: 99%

Active plasma resonance spectroscopy: a functional analytic description

Lapke

Oberrath

Mussenbrock

et al. 2013

Plasma Sources Sci. Technol.

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“…The FDTD simulation is known to be accurate solver of Maxwell's equations with realistic assumptions. It reproduces the experimentally obtained spectra of various microwave probes as well as the cutoff probe [7,[11][12][13][14][15][16]. The input parameters in the FDTD simulation are the material characteristic of the plasma density and collision frequency in the Drude model.…”

Section: Methodsmentioning

confidence: 74%

Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas

et al. 2015

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Recently, the technique for measurement of the sheath width by using the cutoff probe and its equivalent circuit model was proposed and conducted experimentally. In this study, we investigate the reliability of this technique based on the computational simulation. The simulation of three-dimensional Finite-Difference Time-Domain reproduces the transmission spectrum of the cutoff probe with an input parameter of sheath width. We measure the sheath width by using the circuit model and calculate the discrepancy between them under various input plasma densities and sheath widths. The results show the acceptable discrepancy under all of the conditions we studied (the largest discrepancy is about 45%). This indicates that the technique for measurement of sheath width around the floating tip of cutoff probe is robust and reliable.A shorter version of this contribution is due to be published in PoS at: 1 st EPS conference on Plasma Diagnostics

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“…However, based on the analysis in [ 46 ], the CLP and MRP might be seen as unsuitable for high-pressure applications. The CP, likewise, has a limitation for high-pressure plasma measurement [ 47 , 48 , 49 ].…”

Section: Introductionmentioning

confidence: 99%

Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe

Kim¹,

Lee

et al. 2022

Sensors

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Although the recently developed cutoff probe is a promising tool to precisely infer plasma electron density by measuring the cutoff frequency (fcutoff) in the S21 spectrum, it is currently only applicable to low-pressure plasma diagnostics below several torr. To improve the cutoff probe, this paper proposes a novel method to measure the crossing frequency (fcross), which is applicable to high-pressure plasma diagnostics where the conventional fcutoff method does not operate. Here, fcross is the frequency where the S21 spectra in vacuum and plasma conditions cross each other. This paper demonstrates the fcross method through three-dimensional electromagnetic wave simulation as well as experiments in a capacitively coupled plasma source. Results demonstrate that the method operates well at high pressure (several tens of torr) as well as low pressure. In addition, through circuit model analysis, a method to estimate electron density from fcross is discussed. It is believed that the proposed method expands the operating range of the cutoff probe and thus contributes to its further development.

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Simulation of resistive microwave resonator probe for high-pressure plasma diagnostics

Cited by 35 publications

References 8 publications

Active plasma resonance spectroscopy: a functional analytic description

Active plasma resonance spectroscopy: a functional analytic description

Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas

Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe

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