Simulation of SiO2-based piezoresistive microcantilevers

Chivukula, Venkata; Wang, Ming; Ji, Hai‐Feng; Khaliq, Abdul; Fang, Ji; Varahramyan, Kody

doi:10.1016/j.sna.2005.08.038

Cited by 36 publications

(18 citation statements)

References 36 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…(iii) Generally, the influence of isolation and immobilization layers on the device performance is ignored by various researchers primarily to reduce the computational complexity. 15,24,42,43 In the present work, we have included these layers and have numerically analyzed their influence on the thermo-electro-mechanical response of the sensor. (iv) All the above mentioned analyses were carried out at fixed cantilever dimensions.…”

Section: B Simulation Methodologymentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

View full text Add to dashboard Cite

Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM) based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio improves.

show abstract

Section: B Simulation Methodologymentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

View full text Add to dashboard Cite

show abstract

“…In order to verify the simulation results, a 2D analytical solution was obtained for a 200 lm 9 100 lm 9 2 lm bilayer plate (Burgreen 1971). The analytical model assumed that equal thickness polymer and silicon constitute a bilayer plate with polymer perfectly bonded to the substrate along the entire interface area.…”

Section: Modelingmentioning

confidence: 99%

The mechanics of polymer swelling on microcantilever sensors

Privorotskaya

King

2008

Microsyst Technol

View full text Add to dashboard Cite

This paper investigates the swelling mechanics of polymer capture layers integrated into piezoresistive cantilever biochemical sensors. A finite element model investigates mechanical deformations in a polymer layer affixed to a silicon microcantilever. The polymer swells during analyte absorption, inducing deformations in the silicon cantilever which are sensed by a piezoresistive sensor integrated into the cantilever. The highest sensitivity is predicted for short and wide cantilevers that are coated with stiff polymer whose thickness is twice that of the cantilever. While the polymer swelling induces the deformations, the silicon carries most of the load. When portions of the silicon beam are removed to introduce stress concentrations, the system sensitivity can increase by 18% compared to the cantilever without stress concentrations. This study of stress distributions in the cantilever system allows sensor optimization that considers the full 3D effects of polymer swelling mechanics.

show abstract

“…Reports about the design and simulations of a piezoresistive micro-cantilever platform based on CoventorWare ® , a commercial finite element analysis (FEA) tool designed specifically for MEMS applications 12 . Placements of polysilicon piezoresistors are crucial and their placement is optimised to measure differential surface stress caused due to adsorption of any bio-molecule on the functionalised layer.…”

Section: Introductionmentioning

confidence: 99%

“…The adsorption of any bio-molecule takes place on the functionalised layer of sense micro-cantilever which causes a differential surface stress resulting in the bending of microcantilever beam 12,13 , which is here detected by the polysilicon piezoresistors. Sense micro-cantilever is connected with the reference micro-cantilever (devoid of functionalisation layer) in a Wheatstone bridge configuration to obtain an output voltage.…”

Section: Introductionmentioning

confidence: 99%

Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications

et al. 2016

View full text Add to dashboard Cite

Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.

show abstract

Simulation of SiO2-based piezoresistive microcantilevers

Cited by 36 publications

References 36 publications

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

The mechanics of polymer swelling on microcantilever sensors

Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications

Contact Info

Product

Resources

About