Using a trap-assisted compensation
model, we explain why polycrystalline
Si (poly-Si) passivating contacts are able to achieve low leakage
current between the doped fingers of interdigitated back contact (IBC)
monocrystalline Si solar cells despite mixing of boron and phosphorus
dopants in the isolation region. The fill factor of IBC solar cells
is strongly affected by the electrical isolation region between n-
and p-type fingers, as this region is critical in minimizing shunting
losses. During fabrication of monocrystalline Si solar cells with
poly-Si passivating contacts, the intrinsic poly-Si isolation region
inevitably gets contaminated with both p- and n-type dopants. Using
dopant profiles measured with time-of-flight secondary ion mass spectrometry
and scanning probe measurements of the isolation region, we demonstrate
that despite the dopant spreading during cell processing, a well-compensated
region between the doped fingers exists that prevents shunting. The
trap-assisted dopant compensation mechanism significantly widens the
compensated region to tens of microns, where the residual dopant densities
are below the trap density. This enables a high-resistivity region,
resulting in low shunt current. Using one-dimensional (1-D) finite
element diode simulations, we identify the design parameters and experimental
conditions under which a sufficiently resistive region can form. Our
measurements of 2-D local resistivity and work function maps across
the isolation region using scanning spreading resistance microscopy
and Kelvin probe force microscopy demonstrate the existence of a highly
resistive, wide compensated region and confirm our proposed compensation
mechanism. For our structures, this region is ∼25 μm
in width within a ∼150 μm wide finger isolation region
with nearly 3 orders of magnitude higher resistivity than the regions
dominated by a single type of dopant.