Simulation to Predict Target Erosion of Planar DC Magnetron

Qiu, Qingquan; Li, Qingfu; Su, Jingjing; Yu, Junsheng; Jim, Finley

doi:10.1088/1009-0630/10/5/12

Cited by 5 publications

(2 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It is well known that the maximum target erosion depth profile takes place at points where θ = 0, i.e., the magnetic and electric fields are perpendicular [4,[16][17][18]. In balanced magnetron cathodes all points of the magnetic field lines where θ = 0 have the same value of r. However, in unbalanced magnetron cathodes these points where θ = 0 have different values of r. These experimental insights (see figure 4) are illustrated in figure 5.…”

Section: A Discharge Modelmentioning

confidence: 83%

Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

Pereira¹,

Escrivão²,

Teixeira³

et al. 2014

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

The erosion depth profile of planar targets in balanced and unbalanced magnetron cathodes with cylindrical symmetry is measured along the target radius. The magnetic fields have rotational symmetry. The horizontal and vertical components of the magnetic field B are measured at points above the cathode target with z = 2 × 10 −3 m. The experimental data reveal that the target erosion depth profile is a function of the angle θ made by B with a horizontal line defined by z = 2 × 10 −3 m. To explain this dependence a simplified model of the discharge is developed. In the scope of the model, the pathway lengths of the secondary electrons in the pre-sheath region are calculated by analytical integration of the Lorentz differential equations. Weighting these lengths by using the distribution law of the mean free path of the secondary electrons, we estimate the densities of the ionizing events over the cathode and the relative flux of the sputtered atoms. The expression so deduced correlates for the first time the erosion depth profile of the target with the angle θ. The model shows reasonably good fittings to the experimental target erosion depth profiles confirming that ionization occurs mainly in the pre-sheath zone.

show abstract

Section: A Discharge Modelmentioning

confidence: 83%

Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

Pereira¹,

Escrivão²,

Teixeira³

et al. 2014

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The maximum field strength on the surface of the target is about 0.05 T On the other hand, the strong magnetostatic field confines the electrons within the plasma. At magnetic fields of a few Tesla, the electrons typically have gyro radii of a few millimetres and tend to swirl above the target [28,29]. However, since their gyro radii are of the same order of magnitude as the characteristic length of the magnetic field, their orbits are not perfectly helical, though.…”

Section: Resultsmentioning

confidence: 99%

2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion

Addie¹,

Ismail²,

Mohammed³

2022

JASN

View full text Add to dashboard Cite

In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cylindrical coordinate system, and particles such as electrons, atoms, and charged ions of argon, zinc, and carbon were tracked in a DC magnetron sputtering system. The sputtering yield profile and particle flux for the eroded target were studied considering the ion and electron density distributions. The maximum sputtering flux of zinc and carbon was 1.97510 21 m -2 .s -1 and 3.710 18 m -2 .s -1 respectively. The erosion position of a target was predicted based on the maximum power density distribution at the surface of the target. The accuracy of the simulation was checked by comparing it with the measurement of the target eroded after several hours of sputtering. However, as for the Zn-C mosaic target, the racetrack was identical to the analysis predicted by the numerical simulation process. The results of this work can be used as a guide for designing mosaic targets and optimizing their use for fabricating nanohybrid thin film structures.

show abstract

Computer modelling of magnetron discharges

Bogaerts¹,

Bultinck²,

Kolev³

et al. 2009

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

In this paper, some modelling approaches to describe direct current (dc) magnetron discharges developed in our research groups will be presented, including an analytical model, Monte Carlo simulations for the electrons and for the sputtered atoms, a hybrid Monte Carlo-fluid model and particle-in-cell-Monte Carlo collision simulations. The strengths and limitations of the various modelling approaches will be explained, and some characteristic simulation results will be illustrated. Furthermore, some other simulation methods related to the magnetron device will be briefly explained, more specifically for calculating the magnetic field distribution inside the discharge, and for describing the (reactive) sputtering.

show abstract

Simulation to Predict Target Erosion of Planar DC Magnetron

Cited by 5 publications

References 28 publications

Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion

Computer modelling of magnetron discharges

Contact Info

Product

Resources

About