2021
DOI: 10.31399/asm.cp.istfa2021p0441
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Simultaneous Interface Defect Density and Differential Capacitance Imaging by Time-Resolved Scanning Nonlinear Dielectric Microscopy

Abstract: We investigate non-uniformity at SiO2/SiC interfaces by time-resolved scanning nonlinear dielectric microscopy, which permits the simultaneous nanoscale imaging of interface defect density (Dit) and differential capacitance (dC/dV) at insulator-semiconductor interfaces. Here we perform the cross correlation analysis of the images with spatially non-uniform clustering distributions reported previously. We show that Dit images are not correlated with the simultaneous dC/dV images significantly but with the diffe… Show more

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