Simultaneous tomography and topography of silicon integrated circuits using full-field swept-source optical coherence tomography

Anna, Tulsi; Shakher, Chandra; Mehta, Dalip Singh

doi:10.1088/1464-4258/11/4/045501

Cited by 26 publications

(13 citation statements)

References 39 publications

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“…A non-mechanical scanning full-field SS-OCT system includes a swept-source system using broad-band low coherence (SLD) as light source and an AOTF as tunable filter [15][16][17]. The AOTFs are solid-state electronically tunable optical filters that select precise wavelengths by applying an appropriate RF-frequency and hence no mechanically moving parts are required.…”

Section: Methodsmentioning

confidence: 99%

“…One promising development in AOTFs is that they are already commercially available. Light emitted by SLD was coupled to the input of AOTF through a polarization maintaining single mode optical fiber connected through an FC connector to avoid back reflections into SLD [15][16][17]. The beam was collimated using a convex lens.…”

Section: Methodsmentioning

confidence: 99%

“…The precise measurements of film-thickness and sub-surface imaging of ICs nondestructively are important for industrial applications. Various optical methods have been developed and realized for imaging and functional defect-detection of micro-electromechanical system (MEMS) based silicon ICs [17]. We demonstrate simultaneous topography and tomography of micro-electro mechanical systems based on silicon ICs using full-field SS-OCT [17].…”

Section: Application Of Full-field Ss-oct For Siliconmicroelectronic mentioning

confidence: 99%

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Scientific and Engineering Applications of Full-field Swept-source Optical Coherence Tomography

Mehta

Anna

Shakher

2009

Journal of the Optical Society of Korea

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We report the development of full-field swept-source optical coherence tomography (SS-OCT) in the wavelength range of 815-870 nm using a unique combination of super-luminescent diode (SLD) as broad-band light source and acousto-optic tunable filter (AOTF) as a frequency-scanning device. Some new applications of full-field SS-OCT in forensic sciences and engineering materials have been demonstrated. Results of simultaneous topography and tomography of latent fingerprints, silicon microelectronic circuits and composite materials are presented. The main advantages of the present system are completely non-mechanical scanning, wide-field, compact and low-cost.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Application Of Full-field Ss-oct For Siliconmicroelectronic mentioning

confidence: 99%

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Scientific and Engineering Applications of Full-field Swept-source Optical Coherence Tomography

Mehta

Anna

Shakher

2009

Journal of the Optical Society of Korea

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“…The technique of optical frequency-modulated continuous-wave (FMCW) reflectometry has found applications in fields requiring high-resolution, non-invasive three-dimensional ranging and imaging. Examples include LIDAR [1], biomedical imaging [2] and integrated circuit profilometry [3], to name a few. The key component of an FMCW experiment is the swept-frequency (chirped) laser, since its performance directly affects important system metrics.…”

mentioning

confidence: 99%

“…Examples include LIDAR [1], biomedical imaging [2] and integrated circuit profilometry [3], to name a few. The key component of an FMCW experiment is the swept-frequency (chirped) laser, since its performance directly affects important system metrics.…”

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confidence: 99%

Terahertz Chirp Generation Using Frequency Stitched VCSELs for Increased LIDAR Resolution

Vasilyev

Satyan

Rakuljic

et al. 2012

Conference on Lasers and Electro-Optics 2012

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We stitch the frequency chirps of two vertical-cavity surface-emitting lasers in a frequency-modulated imaging experiment at 1550nm. The effective frequency excursion is 1 THz, corresponding to a free-space axial resolution of 150 micrometers. The technique of optical frequency-modulated continuous-wave (FMCW) reflectometry has found applications in fields requiring high-resolution, non-invasive three-dimensional ranging and imaging. Examples include LIDAR [1], biomedical imaging [2] and integrated circuit profilometry [3], to name a few. The key component of an FMCW experiment is the swept-frequency (chirped) laser, since its performance directly affects important system metrics. Specifically, the axial resolution is given by δ d = c/2B, where B is the total frequency excursion, and c is the speed of light [4]. The ranging depth is limited by the coherence of the optical wave and varies inversely with its instantaneous linewidth [5]. Mechanically tunable extended cavity lasers are commonly used in applications requiring axial resolutions of <10 µm, due to the wideband (> 10 THz) tuning achievable with such systems. However, the low coherence associated with these devices limits the ranging depth to, at most, a few millimeters. Commercially available semiconductor lasers (SCLs), on the other hand, offer narrow linewidths corresponding to ranging depths of tens of centimeters to tens of meters, depending on the cavity design, and can be tuned by a modulation of the injection current. The drawback of SCL diodes is the comparatively small modehop-free tuning range of several hundred GHz. Therefore, a single SCL FMCW ranging experiment is limited in axial resolution to a few 100 µm. The key to extending the system's optical bandwidth, and therefore improving the axial resolution, is to concatenate multiple chirps over distinct but adjacent regions of the optical spectrum. This technique, stitching, has been used to improve the axial resolution three-fold in a distributed feedback laser (DFB) based system [4].In the present work we demonstrate the stitching of two off-the-shelf vertical-cavity surface-emitting lasers (VCSELs) at 1550 nm. When compared to DFB lasers, VCSELs offer increased tunability, a faster chirp rate, as well as a significant cost reduction. Stitching enables the synthesis of a measurement with an enhanced axial resolution from

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Nondestructive Material Testing Using OCT

Stifter¹

2015

Optical Coherence Tomography

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Simultaneous tomography and topography of silicon integrated circuits using full-field swept-source optical coherence tomography

Cited by 26 publications

References 39 publications

Scientific and Engineering Applications of Full-field Swept-source Optical Coherence Tomography

Scientific and Engineering Applications of Full-field Swept-source Optical Coherence Tomography

Terahertz Chirp Generation Using Frequency Stitched VCSELs for Increased LIDAR Resolution

Nondestructive Material Testing Using OCT

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