2011
DOI: 10.1088/0957-4484/22/13/135301
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Single crystal-like Si patterns for photonic crystal color filters

Abstract: A novel fabrication method for a two-dimensional photonic crystal color filter based on guided mode resonance is proposed. An amorphous silicon layer deposited through the low-temperature plasma enhanced chemical vapor deposition (PECVD) process is patterned into two-dimensional structures using low-cost nanoimprint lithography. It is then effectively crystallized using multi-shot excimer laser annealing at low energy. We have demonstrated analytically and experimentally that single crystal-like silicon patter… Show more

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Cited by 2 publications
(2 citation statements)
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“…Finally, manufacturing of Si can rely on well-established and cost-efficient processes from CMOS technology. These properties of Si nanostructures have already been used successfully for color elements or antireflection coatings in linear grating, two-dimensional array, and thin-film configurations. Additionally, Si cylinders and optimized polarization sensitive designs have recently been exploited for the specific purpose of reproducing discrete color palettes using isolated elements observed in dark field illumination.…”
mentioning
confidence: 99%
“…Finally, manufacturing of Si can rely on well-established and cost-efficient processes from CMOS technology. These properties of Si nanostructures have already been used successfully for color elements or antireflection coatings in linear grating, two-dimensional array, and thin-film configurations. Additionally, Si cylinders and optimized polarization sensitive designs have recently been exploited for the specific purpose of reproducing discrete color palettes using isolated elements observed in dark field illumination.…”
mentioning
confidence: 99%
“…Optical narrowband filters are desirable in optical measurement devices, display, and imaging devices [1][2][3]. Conventional dielectric structures, including diffraction optic devices [4], photonic crystals [5][6][7][8], and periodic gratings [9][10][11],…”
Section: Introductionmentioning
confidence: 99%