To solve the problem that the traditional articulated arm coordinate measuring machine cannot measure automatically, a self-driven articulated arm coordinate measuring machine (AACMM) is proposed. The length of the connecting rods of the AACMM was allocated according to the design indicators. The AACMM virtual prototype was assembled based on the joint module selection and joint component design, and its measurement space range was also verified. The AACMM ideal measurement model was established based on MDH methodology. The static deformation of the structure and the influence of the dynamic flexible deformation on the positioning error of the probe of the measuring machine was analyzed, respectively. The results show that the measurement space range of the AACMM designed in this paper can meet the design index of the measuring radius. The probe position error caused by static deformation of the measuring machine after structural optimization was reduced by an order of magnitude. The positioning error of the probe caused by the dynamic deformation of the AACMM structure meets the positioning accuracy index. In the constant-speed touch measurement stage, the instantaneous position error of the probe changes linearly with time, and the optimal touch speed (6.6 mm/s, 6.4 mm/s) exists to minimize the probe positioning error. During the variable-speed approach stage, the influence of angular acceleration and velocity of each joint on the positioning error of the probe can be negligible when AACMM in the typical posture. In the extreme posture, , the inertial force of the measuring machine structure and the instantaneous position error of the probe are the smallest with the optimal joint angular acceleration ( ) and angular velocity ( ). The structural design and positioning error performance analysis of self-driving AACMM can provide a theoretical research foundation for subsequent trajectory planning and error compensation modeling.