Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry

Čech, Vladimír; Cechalova, B.; Trivedi, R.; Studynka, J.

doi:10.1016/j.tsf.2009.05.025

Cited by 13 publications

(10 citation statements)

References 14 publications

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“…The thickness of the buffer layer was 1 064 nm and the overlayer was 7 nm. A correlation between the refractive index n and mechanical properties ( E , H ) was shown in our previous study,22 and the refractive index together with the mechanical properties increased with enhanced power. All the parameters ( n , E , H ) correspond to the crosslinking of plasma polymer which is influenced by RF power.…”

Section: Resultssupporting

confidence: 63%

“…The overlayer was modeled as the effective medium26 with a fixed ratio (50%) of the film material and air. Any interlayer between the a‐SiC:H layer and the substrate can be disregarded following previous research 22. Ellipsometric data obtained for O 2 ‐plasma‐pretreated silicon wafers enabled us to evaluate the thickness of the silicon dioxide layer at the surface of the wafer; the value was 4.1 nm.…”

Section: Resultsmentioning

confidence: 99%

“…The structure model for the multilayer film was modified including a buffer layer (BL) and five bilayers comprising layers A and B. Gradient interlayers between layers A and B in the multilayer structure can be disregarded following previous research 22. Thus, the ellipsometric spectra corresponding to a deposited a‐SiC:H multilayer film were analyzed using the sample model in the 12‐layer form Si–SiO 2 /BL/BABABABABA/OL.…”

Section: Resultsmentioning

confidence: 99%

“…In the current work, we report on AFM, AFAM, and nanoindentation investigation of sectioned (ultramicrotomy) multilayer film constructed from soft hydrogenated amorphous carbon‐silicon (a‐SiC:H) alloys deposited from tetravinylsilane (TVS) monomer at different powers by PECVD. This study follows on from an earlier paper22 aimed at ellipsometric analysis of a‐SiC:H multilayer films demonstrating results about reproducible and controllable fabrication of multilayer structures and their analyses based on different optical properties of individual layers.…”

Section: Introductionmentioning

confidence: 91%

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Mechanical Properties of Individual Layers in a‐SiC:H Multilayer Film

Čech

Trivedi

Škoda

2011

Plasma Processes & Polymers

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Hydrogenated amorphous carbon‐silicon (a‐SiC:H) multilayer film consisting of five soft bilayers (layer A: E = 15.4 GPa, H = 1.69 GPa; layer B: E = 9.63 GPa, H = 0.94 GPa) was deposited from tetravinylsilane monomer at two RF powers (10, 0.1 W) on silicon wafer by plasma‐enhanced chemical vapor deposition. The multilayer comprising ten layers of 0.13‐µm thickness was sectioned at a shallow angle of 4° by ultramicrotomy to reveal the individual layers. The layers in the multilayer film were distinguished by the surface topography mode of semicontact atomic force microscopy utilizing the step character in height corresponding to the stiffness of the individual layers and by atomic force acoustic microscopy (AFAM) utilizing the distribution of resonant frequencies corresponding to elastic anisotropy. The sectioned individual layers were sufficiently smooth (roughness: 0.001 µm) to make nanoindentation measurements for each layer. The Young's modulus E and hardness H were determined for individual layers, enabling us to distinguish a stiffer layer A from a more pliant layer B. An influence of the surrounding layers and substrate on the determined mechanical constants was discussed as well.

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Section: Resultssupporting

confidence: 63%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 91%

See 2 more Smart Citations

Mechanical Properties of Individual Layers in a‐SiC:H Multilayer Film

Čech

Trivedi

Škoda

2011

Plasma Processes & Polymers

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“…Layer B was the first layer deposited on the buffer layer; layer A was the last layer, at the surface of multilayer film. Ten layers of the a‐SiC:H multilayer film were sectioned from the film surface at a shallow angle of 4° using a Leica EM UC6 Ultramicrotome (Leica Microsystems) . A 1 µm‐thick buffer layer was used to prevent damage to the diamond knife from contact with the silicon wafer.…”

Section: Mechanical Properties Of Plasma Polymer Filmsmentioning

confidence: 99%

Elastic Modulus and Hardness of Plasma‐Polymerized Organosilicones Evaluated by Nanoindentation Techniques

Čech

Lukeš

Pálesch

et al. 2015

Plasma Processes & Polymers

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Nanoindentation techniques are today a standard tool for the characterization of mechanical properties of thin films at nanoscale. In this feature article, we introduce various techniques, together with their applications for plasma-polymerized organosilicones: starting from conventional instrumented nanoindentation, followed by continuous oscillatory loading and cyclic nanoindentation by partial unloading for assessing the depth profile of mechanical properties, to continuous mechanical mapping over the sample surface. Methods of analyzing and interpreting the measured data are presented to determine the elastic modulus and hardness of tested films. Plasma polymer films are materials of viscoelastic or elastic-plastic behavior; the correct technique must therefore be selected to give the most accurate mechanical property measurements. A number of limitations of the techniques are also discussed. A list of conditions for successful analysis of mechanical properties is included.

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Mechanical properties of plasma polymer films: a review

et al. 2021

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Plasma polymers are micro-, or more commonly, nano-sized coatings that can be deposited on a variety of substrates through different approaches. The versatility of these polymers is incremented by the possibility to use other precursors than conventional polymerization reactions and by potential changes in the polymerization mechanisms according to the intrinsic physical and chemical properties of the plasma. That flexibility offers a fruitful ground to a great range of scientific and engineering fields, but it also brings many challenges for universalization of empirical observations. In this review, the use of different precursors, substrates and changes in plasma external parameters were evaluated as common, but not necessarily ideal nor exhaustive, variables for the analysis of mechanical properties of plasma polymer films. The commonly reported trends are complemented with the exceptions, and a variety of hypothesis drawn by the empirical observations are shown. The techniques and methods used for determining the mechanical properties of plasma polymers, the effect of post-treatments on them and some applications are evaluated. Finally, a general conclusion highlighting the challenges of the field is provided. Article highlights The mechanical properties of plasma polymers are evaluated as a function of selected parameters. The techniques of characterization of mechanical properties of plasma polymers are summarized. A discussion of future and current demands for the analysis of mechanical properties of plasma polymers is done.

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Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry

Cited by 13 publications

References 14 publications

Mechanical Properties of Individual Layers in a‐SiC:H Multilayer Film

Mechanical Properties of Individual Layers in a‐SiC:H Multilayer Film

Elastic Modulus and Hardness of Plasma‐Polymerized Organosilicones Evaluated by Nanoindentation Techniques

Mechanical properties of plasma polymer films: a review

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