Single mask, large force, and large displacement electrostatic linear inchworm motors

Yeh, Richard; Hollar, S.; Pister, Kristofer S. J.

doi:10.1109/jmems.2002.800937

Cited by 131 publications

(77 citation statements)

References 11 publications

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“…Given that the capacitive energy density of both actuators is ultimately limited by the maximum electric field to roughly the same value, MSAs will have a much higher power density, as they can turn N capacitors worth of energy into actuation power vs. just one capacitor worth for EAPs during each actuation. This type of cyclic capacitive actuation has been demonstrated before in more complex systems such as inchworm MEMS micromotors 6,24 and electrostatic rotational motors 25 , but MSAs are easier to scale in 3D and arguably easier to make. There are also other characteristics that distinguish MSAs from EAPs, such as lower voltage compared to classical EAPs, no leakage current compared to i-EAPs, and low viscous losses.…”

Section: % (Ref 10)mentioning

confidence: 96%

Re-engineering artificial muscle with microhydraulics

et al. 2017

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We introduce a new type of actuator, the microhydraulic stepping actuator (MSA), which borrows design and operational concepts from biological muscle and stepper motors. MSAs offer a unique combination of power, efficiency, and scalability not easily achievable on the microscale. The actuator works by integrating surface tension forces produced by electrowetting acting on scaled droplets along the length of a thin ribbon. Like muscle, MSAs have liquid and solid functional components and can displace a large fraction of their length. The 100 μm pitch MSA presented here already has an output power density of over 200 W kg − 1 , rivaling the most powerful biological muscles, due to the scaling of surface tension forces, MSA's power density grows quadratically as its dimensions are reduced.

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Section: % (Ref 10)mentioning

confidence: 96%

Re-engineering artificial muscle with microhydraulics

et al. 2017

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“…Finally, the relative mechanical simplicity of SMA actuation is a large advantage over approaches that require various additional components, such as relatively complex hydraulic/pneumatic solutions or complex and fragile linear actuators based on displacement accumulation (e.g. De Boer et al, 2004, Shutov et al, 2004, Yeh et al, 2002.…”

Section: Shape Memory Alloys Microactuationmentioning

confidence: 99%

Design Optimization of Shape Memory Alloy Structures

Langelaar¹

2004

10th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference

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“…As a result, electrostatic microactuators with large displacement ranges generally suffer from low output forces. Electrostatic micromotors based on stepping motion [5][6][7][8][9][10][11][12][13] are a practical solution for generating large output forces and large displacements simultaneously. These motors use a "large force-short stroke" microactuator to produce small, powerful steps.…”

Section: Introductionmentioning

confidence: 99%

“…These motors use a "large force-short stroke" microactuator to produce small, powerful steps. A clamping mechanism, either based on frictional force [5][6][7][8][10][11][12][13] or obtained with gear teeth [9], is employed to create large displacements via incremental steps. In these motors, the propulsion and the clamping are dissociated to allow for individual optimization of these two mechanisms.…”

Section: Introductionmentioning

confidence: 99%

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

et al. 2010

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Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, electrically grounded surface. By combining the novel design with an innovative micromachining method based on vertical trench isolation, we have greatly simplified the fabrication of the shuffle motors and significantly improved their overall performance characteristics and reliability. Depending on the propulsion voltage, our motor with external dimensions of 290 m × 410 m displays two distinct operational modes with adjustable step sizes varying respectively from 0.6 to 7 nm and from 49 to 62 nm. The prototype was driven up to a cycling frequency of 80 kHz, showing nearly linear dependence of its velocity with frequency and a maximum velocity of 3.6 mm/s. For driving voltages of 55 V, the device had a maximum travel range of 70 m and exhibited an output force of 1.7 mN, resulting in the highest force and power densities reported so far for an electrostatic micromotor. After five days of operation, it had traveled a OPEN ACCESSMicromachines 2010, 1 49 cumulative distance of more than 1.5 km in 34 billion steps without noticeable deterioration in performance.

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Single mask, large force, and large displacement electrostatic linear inchworm motors

Cited by 131 publications

References 11 publications

Re-engineering artificial muscle with microhydraulics

Re-engineering artificial muscle with microhydraulics

Design Optimization of Shape Memory Alloy Structures

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

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