Single neuronal recordings using surface micromachined polysilicon microelectrodes

Muthuswamy, Jit; Okandan, Murat; Jackson, Nathan

doi:10.1016/j.jneumeth.2004.07.017

Cited by 19 publications

(21 citation statements)

References 29 publications

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“…By day 6, the magnitude of the impedance has dropped to approximately 100 kΩ at 1 kHz. The charge-transfer properties and stability of the epoxy insulated polysilicon microelectrode is discussed in greater detail in our previous study [24].…”

Section: Resultsmentioning

confidence: 99%

“…We found that the thermal microactuators generated sufficient force to move the microelectrodes through the brain tissue. Our previous study using polysilicon microelectrodes without taper and a sensitive load cell [24] demonstrated forces in the order of 1 mN for the penetration of the dura, and drastically smaller forces required subsequently to move the microelectrode within the brain tissue. However, an earlier clinical study using spheres of 2.5-mm diameter moved at the rate of 0.33 mm/s [26] reported that the force experienced by the spheres to be in the range of 8 ± 2 g. Tuohy needles (17-gauge) moved at the rate of 20 mm/min have been found to require forces in the range of 5-8 N to puncture the dura mater [27].…”

Section: Discussionmentioning

confidence: 97%

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An Array of Microactuated Microelectrodes for Monitoring Single-Neuronal Activity in Rodents

Muthuswamy

Okandan

Gilletti

et al. 2005

IEEE Trans. Biomed. Eng.

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Arrays of microelectrodes used for monitoring single-and multi-neuronal action potentials often fail to record from the same population of neurons over a period of time for several technical and biological reasons. We report here a novel Neural Probe chip with a 3-channel microactuated microelectrode array that will enable precise repositioning of the individual microelectrodes within the brain tissue after implantation. Thermal microactuators and associated microelectrodes in the Neural Probe chip are microfabricated using the Sandia's Ultraplanar Multi-level MEMS Technology (SUMMiTV) process, a 5-layer polysilicon microma-chining technology of the Sandia National labs, Albuquerque, NM. The Neural Probe chip enables precise bi-directional positioning of the microelectrodes in the brain with a step resolution in the order of 8.8μm. The thermal microactuators allow for a linear translation of the microelectrodes of up to 5 mm in either direction making it suitable for positioning microelectrodes in deep structures of a rodent brain. The overall translation in either direction was reduced to approximately 2 mm after insulation of the microelectrodes with epoxy for monitoring multi-unit activity. Single unit recordings were obtained from the somatosensory cortex of adult rats over a period of three days demonstrating the feasibility of this technology. Further optimization of the microelectrode insulation and chip packaging will be necessary before this technology can be validated in chronic experiments.

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Section: Resultsmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 97%

An Array of Microactuated Microelectrodes for Monitoring Single-Neuronal Activity in Rodents

Muthuswamy

Okandan

Gilletti

et al. 2005

IEEE Trans. Biomed. Eng.

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“…Abnormal transmission of glutamate can cause neurological diseases such as communication dysfunction, cognitive impairments, schizophrenia, Parkinson's disease, stroke and epilepsy 4,5 . Glutamate transformation in excitatory and neurovirulent processes has been studied for decades [6][7][8][9][10][11] .…”

Section: Introductionmentioning

confidence: 99%

An implantable microelectrode array for simultaneous L-glutamate and electrophysiological recordings in vivo

et al. 2015

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L-glutamate, the most common excitatory neurotransmitter in the mammalian central nervous system (CNS), is associated with a wide range of neurological diseases. Because neurons in CNS communicate with each other both electrically and chemically, dualmode (electric and chemical) analytical techniques with high spatiotemporal resolution are required to better understand glutamate function in vivo. In the present study, a silicon-based implantable microelectrode array (MEA) composed of both platinum electrochemical and electrophysiological microelectrodes was fabricated using micro-electromechanical system. In the MEA probe, the electrophysiological electrodes have a low impedance of 0.018 MΩ at 1 kHz, and the electrochemical electrodes show a sensitivity of 56 pA µM −1 to glutamate and have a detection limit of 0.5 µM. The MEA probe was used to monitor extracellular glutamate levels, spikes and local field potentials (LFPs) in the striatum of anaesthetised rats. To explore the potential of the MEA probe, the rats were administered to KCl via intraperitoneal injection. K + significantly increases extracellular glutamate levels, LFP low-beta range (12-18 Hz) power and spike firing rates with a similar temporal profile, indicating that the MEA probe is capable of detecting dual-mode neuronal signals. It was concluded that the MEA probe can help reveal mechanisms of neural physiology and pathology in vivo.

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“…(5)(6)(7) During the past decade, many and perhaps most types of implanted microelectrode structures and fabrication processes have been studied. (5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20) Regarding the deep-brain microelectrode for long-term recording/stimulation, all the materials used to make the microelectrode must be biocompatible, and Pt and Pt 90 Ir 10 alloy are the best materials for microelectrode films and microwires, respectively, because of their good biocompatibility and corrosion resistance and also because of the charge injection capacity of Pt and low impedance and good mechanical property of Pt 90 Ir 10 alloy. (5,21) As for the microelectrode, whether telemetry is used or not in the electrode system, communication between the implanted microelectrode and the outside stimulator must be carried out through a multichannel of interconnected microwires and a percutaneous connector.…”

Section: Introductionmentioning

confidence: 99%

“…The mechanical and electrical stabilities of the connection are critical to the performance of the microelectrode system. In the above-mentioned references, microwire bonding was also studied and carried out by ultrasonic bonding, (5,9) soldering, (13) gluing with conductive epoxy (14,20) or micromachining. (5) However, owing to the high hardness and melting points of Pt and Pt 90 Ir 10 , it is diffi cult to connect Pt 90 Ir 10 microwires to Pt thin fi lm using the above joining methods.…”

Section: Introductionmentioning

confidence: 99%

PtIr Microwire Bonding for Deep-Brain Microelectrode by Electroplating

2009

Sensors and Materials

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Microelectrodes have been extensively implanted into patients' deep brain for longterm treatments of nervous system disorders, and Pt and PtIr are the preferred materials for the microelectrode fi lm and microwire, respectively, because of their biocompatibility. A novel method of microwire bonding for connecting Pt 90 Ir 10 microwires to the microelectrode is presented in this paper. After the microelectrode was fabricated through microelectromechanical systems (MEMS) techniques, the Pt 90 Ir 10 microwire was connected to the microelectrode by electroplating Pt fi lm on the microwires fi xed on the connection pads of the microelectrode, instead of using a traditional bonding or soldering process. Optical photomicrography and scanning electron microscopy (SEM) revealed that the Pt 90 Ir 10 microwire was connected tightly to the microelectrode by electroplating. The measured tensile strengths of the microwire connections reached up to 0.375 MPa for the Pt fi lm with a thickness of 3 μm and above, and the maximum tensile force that the microwire (75 μm diameter) could withstand was about 1.6 N. Experimental results indicated that the electroplating connection could provide suffi cient strength for the microelectrode to accurately reach the target position in the deep brain.

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Single neuronal recordings using surface micromachined polysilicon microelectrodes

Cited by 19 publications

References 29 publications

An Array of Microactuated Microelectrodes for Monitoring Single-Neuronal Activity in Rodents

An Array of Microactuated Microelectrodes for Monitoring Single-Neuronal Activity in Rodents

An implantable microelectrode array for simultaneous L-glutamate and electrophysiological recordings in vivo

PtIr Microwire Bonding for Deep-Brain Microelectrode by Electroplating

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