Single photon emission was observed from site-controlled InGaN/GaN quantum dots. The singlephoton nature of the emission was verified by the second-order correlation function up to 90 K, the highest temperature to date for site-controlled quantum dots. Micro-photoluminescence study on individual quantum dots showed linearly polarized single exciton emission with a lifetime of a few nanoseconds. The dimensions of these quantum dots were well controlled to the precision of state-of-the-art fabrication technologies, as reflected in the uniformity of their optical properties. The yield of optically active quantum dots was greater than 90%, among which 13%-25% exhibited single photon emission at 10 K.Semiconductor quantum dots (QDs) have diverse quantum photonic applications [1,2] [2] However, most work to date has been based on self-assembled QDs in III-As and III-P materials, which face severe limitations in operating temperature and scalability. III-As and III-P QDs typically operate at cryogenic temperatures due to the relatively small exciton binding energies and QD-barrier band offsets. Furthermore, self-assembled QDs are formed at random locations and suffer from large inhomogeneity in size and spectral distribution, which prevents controlled coupling of multiple QDs or coupling of QDs with cavities. In this letter, we report single photon emission from sitecontrolled single InGaN/GaN QDs that are scalable for manufacturing and can be readily integrated with cavities.To achieve cryo-free operation, III-N QDs with large QD-barrier band offsets and exciton binding energies have emerged as one of the most promising solutions. Single photon emission has been reported up to 200 K, although only in a self-assembled GaN/AlN QD[10] and an InGaN QD in a self-organized AlGaN nanowire. [11] To control the position of a III-N QD, various approaches have been explored. [12][13][14][15][16][17][18] To date, QD-like emission has only been reported from dots formed at the apex of a sitecontrolled GaN pyramid [12,17] and dots at the top of a site-controlled AlGaN nanowire.[18] But no single photon emission has been reported from these systems yet.In this work, we fabricated site-controlled InGaN/GaN QDs by dry etching of a planar single quantum well * dengh@umich.edu † peicheng@umich.edu (QW). This structure has been applied to III-As systems but with very limited success, due to the detrimental surface effects introduced by the etched sidewall. [19] In contrast, the surface recombination velocity of III-N is 2-3 orders of magnitude slower than that of IIIAs. [20,21] Bright luminescence has been observed from ensembles of III-N nano-pillars etched from multiple QW structures, [13][14][15] and from a single quantum disk at the room temperature.[22] Yet no clear evidence of single photon emission from these structures have been reported so far. Here we not only show single photon emission from our lithographically defined, scalable single InGaN/GaN QDs but also show that this quantum phenomenon survives at temperatures up to 90...