2020
DOI: 10.1364/oe.380305
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Single-shot freeform surface profiler

Abstract: We propose a novel and simple method of single-shot freeform surface profiler based on spatially phase-shifted lateral shearing interferometry. By the adoption of birefringent materials, the laterally shearing waves are simply generated without any bulky and complicated optical components. Moreover, the phase maps that lead to the 3D profile of the freeform surface can be instantly obtained by the spatial phase-shifting technique using a pixelated polarizing camera. The proposed method was theoretically descri… Show more

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Cited by 18 publications
(8 citation statements)
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“…This is because it enables high-speed or even real-time measurement, which is essential in industrial metrology, where outside conditions are not optimized as they are in the laboratory. For example, Seo et al [1] proposed a single-shot freeform surface profiler based on spatially phase-shifted lateral shearing interferometry. The single-shot approach is actively under research, especially in the field of fringe projection techniques.…”
Section: Introductionmentioning
confidence: 99%
“…This is because it enables high-speed or even real-time measurement, which is essential in industrial metrology, where outside conditions are not optimized as they are in the laboratory. For example, Seo et al [1] proposed a single-shot freeform surface profiler based on spatially phase-shifted lateral shearing interferometry. The single-shot approach is actively under research, especially in the field of fringe projection techniques.…”
Section: Introductionmentioning
confidence: 99%
“…Compared with other methods, the phase-shifting LSI method can be used to measure the phase distribution of the wavefront and can show real-time display 7 , 8 . A high-precision surface profile measurement technology is phase-shifting shearing interference 9 11 In this technology, to obtain information about the optical surface, phase-shifting technology must be used.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the testing precision is affected. LSI 9 has been widely used to analyze optical wavefront. However, LSI requires both a lateral beam shearing device and a phase-shifting mechanism to function, which makes the system both bulky and slow.…”
Section: Introductionmentioning
confidence: 99%
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