Single-shot high speed aerial chromatic confocal metrology sensor

Prause, Korbinian; Herkommer, Alois; Pinzer, B; Layh, Michael

doi:10.1117/1.oe.60.12.124110

Cited by 7 publications

(6 citation statements)

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“…In combination with the 4f-system to filter non-focused wavelength components and this spectral analysis unit, a full field areal chromatic confocal measurement is performed. This procedure is the key method for obtaining the height information encoded into the spectral domain without decoding the spectral information into a spatial dimension 22 , 23 …”

Section: Methodsmentioning

confidence: 99%

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Toward areal chromatic confocal metrology

2023

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Chromatic confocal metrology suffers from a limitation in the number of measurement points that can be measured simultaneously in a single frame acquisition. We propose chromatic confocal areal metrology (ChromaCAM), in which the surface height for each point in a 2D grid of measurement spots, generated by a rectangular micro-lens array, is parallely analyzed through the utilization of a pinhole multiplexer unit, an analog optical analysis unit, and postprocessing algorithms. An experiment shows the viability of the simultaneous acquisition of multiple measurement points and the advantages over exisiting areal chromatic confocal approaches. Compared with conventional chromatic confocal metrology, the increase in the acquisition rate is significant and enables one-shot measurements.

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Section: Methodsmentioning

confidence: 99%

“…This procedure is the key method for obtaining the height information encoded into the spectral domain without decoding the spectral information into a spatial dimension. 22,23 To obtain an encoding of the axial depth information into the wavelength domain, a hyperchromatic objective is employed. Figure 2 show the design [Fig.…”

Section: Methodsmentioning

confidence: 99%

Toward areal chromatic confocal metrology

2023

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“…The spectral's first momentum obtained is close to the maximum of the spectral distribution and therefore uniquely correlates with the surface height to be measured. [10][11] [12] 3. METHODS…”

Section: Principlesmentioning

confidence: 99%

“…The existing prototype allows for the determination of the approximate width of the Gaussian function at a defined object height of 20 nm under these conditions. [12] A simulation was conducted to analyse how the spectrum of the light source affects the measurement system. To simplify the system, the following assumptions were made.…”

Section: Spectral Optimization Of the Light Sourcementioning

confidence: 99%

Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology

Lochbrunner,

Prause,

Büttner

et al. 2024

Photonic Instrumentation Engineering XI

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The spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This work investigates the impact of the spectral composition and light power of the light source on the sensitivity and accuracy of this method. A thorough optimization of the light source will be conducted, demonstrating the impact of various spectral compositions and light source power on the system performance, taking into account the system-related etendue. In addition, the optimization of the spectral transmission filter used in the optical spectral analysis unit and its influence on the accuracy and sensitivity of the system over the entire measurement range is shown.

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“…Building upon this concept, Korbinian Prause et al designed a spectral confocal measurement sensor comprising four primary components: illumination, hyperchromatic objectives, a pinhole multiplexer unit, and an optical spectral analysis unit. Utilizing a two-dimensional grid pattern of polarization points encoding surface height into frequency or wavelength domain of light, the system achieved high-speed, high-resolution primary surface measurements without mechanical depth scanning 4 . Dawoon et al proposed a frequency-scanning source-based chromatic aberration confocal microscope system employing a wavelength-scanning laser as the light source.…”

Section: Introductionmentioning

confidence: 99%

High-speed spectral confocal signal collection method based on acquisition and tracking algorithm with variable window-width

Wang,

Ren,

Liang

et al. 2023

Optical Metrology and Inspection for Industrial Applications X

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Single-shot high speed aerial chromatic confocal metrology sensor

Cited by 7 publications

References 0 publications

Toward areal chromatic confocal metrology

Toward areal chromatic confocal metrology

Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology

High-speed spectral confocal signal collection method based on acquisition and tracking algorithm with variable window-width

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