Single-shot wide-field topography measurement using spectrally multiplexed reflection intensity holography via space-domain Kramers–Kronig relations

Abstract

Surface topology measurements of micro- or nanostructures are essential for both scientific and industrial applications. However, high-throughput measurements remain challenging in surface metrology. We present single-shot full-field surface topography measurement using Kramers–Kronig holographic imaging and spectral multiplexing. Three different intensity images at different incident angles were simultaneously measured with three different colors, from which a quantitative phase image was retrieved using spatial Kramers–Kronig relations. A high-resolution topographic image of the sample was then reconstructed using synthetic aperture holography. Various patterned structures at the nanometer scale were measured and cross-validated using atomic force microscopy.

Quantitative phase imaging based on holography: trends and new perspectives

“…Spatially partially coherent illumination can be introduced in the non-interferometric setup by using LED illumination 246 , 247 , and the reflection wide-field intensity topography measurement 248 . For band-limited imaging systems, an expanded space-bandwidth can be achieved.…”

“…In addition to extracting feature-rich morphology, it maintains a reliable quantitative phase profile. By using the principle of KK relations, accurate reconstruction of the surface topography can be achieved in a single shot by combining holographic imaging and spectral multiplexing when the angles of incidence precisely match the NA of the optical system 248 . An analysis of the 3D system is considered for a more complete reconstruction of the RI distribution of thick objects.…”

Unsupervised Deep Learning Enables 3D Imaging for Single‐Shot Incoherent Holography

“…Digital holography has attracted much attention because of its ability to image 3D scenes from a single viewpoint. [1][2][3][4][5] Compared DOI: 10.1002/lpor.202301091 with direct imaging, digital holography is an indirect multi-step imaging process that includes optical recording holograms and numerical computation reconstruction, which provides application scenarios for computational imaging methods, [6,7] including deep learning. [8][9][10] In recent years, incoherent digital holography has attracted attention due to the advantages of higher imaging resolution, no speckle noise and edge ringing, a common light source, and low cost.…”

Amplified Nonreciprocal Reflection in a Uniform Atomic Medium with the Help of Spontaneous Emissions

“…In order to avoid difficulties in most systems, research on optical nonreciprocity has shifted toward uniform atomic systems. Recently, perfectly asymmetric reflection has been achieved in a homogeneous continuous medium, with a refractive index of the plane electromagnetic wave obeying the spatial Kramers-Kronig (KK) relation [29][30][31][32][33][34]. Based on the KK relation, many efficient schemes of controlled unidirectional reflection in cold atoms have been proposed through suitable design of controlled Rydberg atoms or the linear variation of coupling field intensities [35][36][37], which is more simple and controllable in experiments.…”