2022
DOI: 10.1002/smll.202202128
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Single‐Step‐Lithography Micro‐Stepper Based on Frictional Contact and Chiral Metamaterial

Abstract: Stepper motors and actuators are among the main constituents of control motion devices. They are complex multibody systems with rather large overall volume due to their multifunctional parts and elaborate technological assembly processes. Miniaturization of individual parts is still posing assembly problems. In this paper, a single‐step lithography process to fabricate a micro‐stepper engine with an accurate micrometric rotation axis and an overall sub‐millimeter size is demonstrated. The device is based on th… Show more

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Cited by 16 publications
(12 citation statements)
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“…However, there are still many challenges to overcome in the design of periodic porous metamaterials with embedded multi-body systems. For instance, the distance between each flexible component is tough to control precisely, especially at the micron scale 76 . Therefore, a more straightforward method to design the converters is required.…”
Section: Design Philosophy Of Converters and Metamaterialsmentioning
confidence: 99%
“…However, there are still many challenges to overcome in the design of periodic porous metamaterials with embedded multi-body systems. For instance, the distance between each flexible component is tough to control precisely, especially at the micron scale 76 . Therefore, a more straightforward method to design the converters is required.…”
Section: Design Philosophy Of Converters and Metamaterialsmentioning
confidence: 99%
“…[18,19] One of the most promising fields of study relating to such easily applicable functional materials is that of mechanical metamaterials. [20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] Mechanical metamaterials are rationally designed structures that can exhibit counterintuitive mechanical properties based primarily on their design rather than their chemical composition. The most studied cases and well-known examples of metamaterials with extraordinary mechanical properties pertain to those with negative properties such as a negative Poisson's ratio (auxetic compression.…”
Section: Introductionmentioning
confidence: 99%
“…Mechanical metamaterials are man-made by principle and possess distinctive characteristics compared to traditional materials. [1][2][3][4][5][6][7][8][9][10] Their properties mainly depend on their architecture rather than on their chemical composition. [11][12][13][14][15][16] A considerable number of mechanical metamaterial articles have been published during the last two decades.…”
Section: Introductionmentioning
confidence: 99%