Single Transistor Oscillator Based on Piezoelectric Resonant Nanochannel for Operation in Liquids

Abstract

A single transistor oscillator based on an 18 MHz piezoelectric resonant nanochannel is presented as the first demonstration of MEMS acoustic resonators with integrated nanochannels connected to a compact and portable oscillator readout enabling the sensor operation in liquids. This result represents a breakthrough for MEMS resonators operated in liquids as these devices are the first of their kind to be directly connected to a compact electronic oscillator.