This work is devoted to the experimental and theoretical study of rf frequency influence on the discharge structure and the O 2 (a 1 ∆ g ) yield in a rf discharge in the tubes with HgO coating for removing atomic oxygen to avoid fast O 2 (a 1 ∆ g ) quenching. Two series of experiments were carried in two discharge sets up: 1 -tube of large diameter of 14 mm, electrode length of 30 cm; 2 -tube of small diameter of 7 mm, electrode length of 10 cm. In the first series, the increase of rf frequency from 13.56 MHz to 81 MHz resulted in the singlet oxygen (SO) yield Y >15% at such high oxygen pressure as 10 Torr. 2D self-consistent model was developed to simulate the rf discharges in gas flow in a wide rage of discharge parameters both with and without HgO coating. Results of the simulation agreed very well with the experimental data. It is shown that at the high rf frequency the discharge operates in a mode of the normal current density so that the energy absorbed by electrons from the rf field increases with the frequency. In the second series we scaled up the rf discharge on the pd parameter (p-pressure, d-tube diameter) to increase the oxygen pressure. The pd discharge scaling at the high rf frequency allowed to reach the O 2 (a 1 ∆ g ) yield Y > 15% at oxygen pressure up to ~17 Torr. The effect of NO admixture on the O 2 (a 1 ∆ g ) production has been studied in series 2 at rf frequency of 160 MHz. NO admixture (5÷20%) results in the noticeable increase in the O 2 (a 1 ∆ g ) yield in comparison with the discharge tube without HgO coating. It is shown that combination of O 2 + NO mixture with HgO coating of the discharge tube walls provides the most optimal O 2 (a 1 ∆ g ) production with the efficiency up to 7-10 % and allows to reach the threshold yield in 15 % at oxygen pressure even above ~20 Torr.