Ni/yttria stabilized zirconia (Ni/YSZ) anode was investigated in the aspect of microstructure. Atomic resolution transmission electron microscopy and high resolution focused ion beamscanning electron microscopy (FIB-SEM) were used to study the atomic structure of boundaries and phase contrast, respectively. Images of Ni/YSZ interface and Ni/YSZ/pore triple-phase boundary were obtained. High-Index contact surfaces were found. Distinct phase contrast among Ni, YSZ and resin was observed during the slice and view process in FIB-SEM.