SiOF and SiO&lt;sub&gt;2&lt;/sub&gt; deposition in a HDP reactor: tool characterisation and film analysis

Boer, D.J. den; Fukuda, H.; Hilst, J.B.C. van der; Kalkman, A.J.; Janssen, G.C.A.M.; Radelaar, S.

doi:10.1109/mam.1998.887516

European Workshop Materials for Advanced Metallization, 1998

DOI: 10.1109/mam.1998.887516

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SiOF and SiO<sub>2</sub> deposition in a HDP reactor: tool characterisation and film analysis

D.J. den Boer¹,

H. Fukuda²,

J.B.C. van der Hilst³

et al.

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SiOF and SiO<sub>2</sub> deposition in a HDP reactor: tool characterisation and film analysis

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