Site‐selective atmospheric pressure plasma‐enhanced chemical vapor deposition process for micrometric deposition of plasma‐polymerized methyl methacrylate

Abstract

An atmospheric pressure plasma chemical vapor deposition process designed for the site‐selective deposition of organic functional materials with a sub‐millimetric lateral resolution is presented in this study. Injecting methyl methacrylate vapor in plasma post‐discharge allowed to synthesize plasma‐polymerized methyl methacrylate (ppMMA) coatings on metallic, dielectric, and polymer substrates at close to room temperature (40°C). A circular dot, as small as 400 µm in diameter, of ppMMA is deposited and characterized by Fourier‐transform infrared spectroscopy, X‐ray photoelectron spectroscopy, and high‐resolution mass spectrometry. Oligomeric species of poly‐MMA up to n = 18 have been detected, evidencing the particularly “soft” polymerization offered by the presented process.

Iron oxide/graphene oxide nanocomposite synthesis using atmospheric cold plasma

“…The estimation of the post-discharge gas temperature was done by measuring the rotational temperature of OH ( λ = 306 to λ = 310 nm) from the OES data. 45 This temperature is competitively lower than the current lowest temperature of graphene synthesis (>250 °C) 46 achieved using atmospheric pressure microwave plasma. 47,48 Therefore, we estimate the great perspective of this process as it opens a new horizon in low-temperature single-step preparation of metal-oxide@graphene-based nanocomposites.…”

AP-PACVD plasma printer: investigating the influence of gas flow rates to printing resolution in parallel with CFD simulation

“…As reported in a previous paper [10], the micro-deposition was obtained by carefully setting the two different gas flows: [Ar + MMA] in the central capillary and [Ar] in the plasma discharge tube. Getting a circular plasma polymerised MMA dot requires a very sharp tuning of the different gas flows.…”

“…To perform a CVD process, a precursor has to be introduced into the area with reactive species. This can be done in two sections: into the plasma discharge [9] or into the 'post-discharge' region [10,11], which is the region downstream after the plasma discharge where only reactive neutral species are present (no electrons neither ions) [12][13][14]. Injection into the plasma discharge offers higher reactivity as it can directly utilize the high-energy electrons.…”

“…Thus, in order to take an advantage of postdischarge region species and not to bear the constraint of Debye length, our approach focused to work on post-discharge plasma along with the decoupling of the plasma unit and precursor delivery system. In particular, the interest of such a process to deposit sub-millimetre plasma polymerised methylmethacrylate (ppMMA) dots exhibiting high weight oligomers has been evidenced in a recent article [10]. From this work, it appears that the ppMMA deposition kinetics and coating size strongly rely on the two gas flows involved: plasma gas flow and precursor carrier gas flow.…”

“…This is a co-axial geometry giving rise to the central jet plus the annular jet system. A more complete description of the device has been already reported [10]. In the coaxial geometry doubles jet system, an appearance of both the stagnation zone from the central jet and the re-circulatory behaviour from the annular jet is expected.…”