“…To date, mechanical exfoliation and CVD are widely used to obtain high-quality 2D nanoflakes. , However, it is difficult to produce large-area 2D REOX nanoflakes by mechanical exfoliation due to their quasi-layered structure with strong interlayer interaction, ,, impeding the comprehensive investigation of their physical properties and practical applications. For the growth of 2D materials using CVD, substrates play significant roles, including adsorbing reactants, promoting nucleation, and stimulating epitaxial growth. , In contrast to the seeded growth in which materials nucleate from predefined seeds only in the initial stages, , substrates that are atomically flat and chemically inert at the surface provide favorable growth sites for the epitaxy of 2D materials during the entire growth process. , However, on account of the unsuitability of precursors, such as the high melting point of RE oxides (>2200 °C) and the high hygroscopicity of anhydrous halides, only a few individual 2D REOXs are obtained by CVD, while their synthesis is still a significant challenge. Meanwhile, 2D heterostructures and superlattices have emerged as fascinating systems for investigating their exotic structure and physics. − The epitaxial growth of the lateral heterostructures (with distinct material blocks) or superlattices (with alternating blocks) requires complex and harsh synthesis processes by CVD. , Therefore, it is highly desirable to expand a strategy for 2D REOX and lateral heterostructure synthesis.…”