Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Abstract

Merging two state-of-the-art surface research techniques, in particular, atomic force microscopy (AFM) and scanning electron microscopy (SEM), within a single system is providing novel capabilities like direct visual feedback and life-monitoring of tip-induced nanoscale interactions. In addition, the combination of AFM and SEM accelerates nanoscale characterization and metrology development. Here, the concept and first results of a novel AFM-integration into a high resolution scanning electron microscope and focused ion beam system for nanoscale characterization is presented. In this context, a six-axis AFM system using self-sensing thermomechanically transduced active cantilever was developed and integrated. The design of the developed AFM-integration is described and its performance is demonstrated. Results from combined examinations applying fast AFM-methods and SEM-image fusion, AFM-SEM combined metrology verification, and three dimensional-visualization are shown. Simultaneous operation of SEM and AFM provides a fast navigation combined with sub-10 nm topographic image acquisition. Metrology application scenarios of combined studies are discussed, for example of MoS2 and diverse metrological test structures.

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

“…The prototype tip-scanning AFM scan head is designed explicitly for correlative analysis inside electron and ion-beam microscopes. Unlike sample scanning solutions [ 9 , 16 ], where the sample is raster-scanned relative to a stationary cantilever, a tip-scanning configuration [ 10 , 17 ] requires no alteration of the sample stage and has the advantage of having the sample stationary within the field of view of the HIM during AFM imaging. The scanner is a flexure design with serial kinematics [ 18 ] and the cantilever is mounted at the end of a low-profile protruding z -flexure, which fits seamlessly between the pole piece and the sample.…”

Enhanced EDX images by fusion of multimodal SEM images using pansharpening techniques

“…In Wortmann () and Angelov et al . () atomic force microscopy and SEM are combined to provide a view of the topography and material properties of the sample. In Milillo et al .…”

“…Up to the best of our knowledge, the literature on SEM image fusion is quite limited. In Wortmann (2009) andAngelov et al (2016) atomic force microscopy and SEM are combined to provide a view of the topography and material properties of the sample. In Milillo et al (2015), SEM and ToF-SIMS images are combined to increase the spatial resolution of the ToF-SIMS modality.…”

Atomic Force Microscopy Imaging in Turbid Liquids: A Promising Tool in Nanomedicine

“…The installation of strain sensors directly into the cantilever is of particular interest as it offers several advantages over techniques with external readout. Some of the most important advantages are: (i) extremely small cantilevers far below the optical diffraction limit to increase sensitivity and so imaging speed can be realized [ 32 , 33 ], (ii) avoiding interference with photosensitive samples, (iii) the possibility of multi-cantilever arrays [ 34 , 35 , 36 ] and (iv) combining AFM with other techniques, such as scanning electron microscopy (SEM) [ 37 , 38 , 39 , 40 ]. In addition to the new readout method, advances in microfabrication have allowed the direct integration of actuators on the cantilever, such as piezoelectric excitation [ 41 ], Lorentz excitation [ 42 ], magnetic excitation [ 43 , 44 , 45 , 46 ] and thermal excitation [ 47 ].…”