Six-Axis Nanopositioning Device With Precision Magnetic Levitation Technology

Abstract

Abstract-In this paper, we present the design, control, and testing of a 6 degrees-of-freedom magnetically-levitated system with nanometer-precision positioning capability and several-hundred-micrometer travel range. This system levitates a triangular single-moving-part platen, and produces the six-axis motion with six single-axis linear actuators. One of the prominent advantages of this magnetic levitation (maglev) system is that there is no physical contact between the moving part and the stator, which eliminates friction, wear, backlash, and hysteresis. As compared to other traditional devices, the present system is very compact with the minimum number of actuators for six-axis motion generation. The maglev device presented herein shows the position resolution better than 5 nm with 2-nm rms position noise, and is capable of a velocity of 0.5 m/s and an acceleration of 30 m/s 2 . The nominal power consumption is only 15 mW by each horizontal actuator, and 320 mW by each vertical actuator. The actuators are sized to be able to orient and position a maximum payload of 1 kg. The key application of this maglev device is the manipulation at nanoscale for microassemblies and manufacture of their parts. Other potential applications are stereolithography, vibration-free delicate instrumentation, and microscale rapid prototyping.

Design and Optimization of a Lorentz-Force-Driven Planar Motor

“…In modern high-end manufacturing or testing equipment, such as a wafer stage in a lithography machine, micro/nano positioning platform, and scanning probe microscope, the requirements of the high-precision multi-degree-of-freedom actuating elements are increasing [1][2][3][4][5][6]. Generally, there are three conventional methods to realize multi-degree-of-freedom positioning motions.…”

Indirect magnetic suspension by an actively controlled permanent magnet

“…For the last several decades, magnetic suspension systems have been studied by many researchers [8,9]. The possibility of ultra-fine motion control in the nanometer order was confirmed [10][11][12]. A magnetic suspension system for micromanipulation was also discussed [13].…”

A Magnetically Levitated Precise Pointing Mechanism for Application to Optical Communication Terminals

“…Magnetic levitation has been considered and implemented in many areas and differing fields, and achieved high precision positioning, as demonstrated by [9] and [10]. However this technology has not been applied to a space-borne magnetically levitated optical telescope.…”

“…However this technology has not been applied to a space-borne magnetically levitated optical telescope. The system developed by [9] levitates a 6-DOF triangular platform that demonstrates a 5 nm position resolution for 6 axes but has a very small travel range in the order of micro-meters. Used effectively this technology can provide the accuracy requirements in order to maintain an effective optical communications link [9,11,12].…”

“…The system developed by [9] levitates a 6-DOF triangular platform that demonstrates a 5 nm position resolution for 6 axes but has a very small travel range in the order of micro-meters. Used effectively this technology can provide the accuracy requirements in order to maintain an effective optical communications link [9,11,12]. Applications of this technology are terrestrial inter building links, space-borne deep space communications, or a GEO-LEO relay satellite in the micro-sat range.…”