Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage

Lo, Chi-Chen; Hsu, Wen-Huai; Liu, Chien-Sheng

doi:10.1016/j.optlaseng.2022.107407

Cited by 8 publications

(1 citation statement)

References 34 publications

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“…Therefore, for the laser beam pointing stability requirements of the system, it is necessary to derive the stability requirements for each optic based on the beam transmission relationships within the system [8][9][10]. Additionally, it is critical to determine the range of misalignments that each optic must control, and to assess the error sensitivity of different optics to pointing stability [11,12]. J H Burge [13] proposed using the ray tracing method of geometric optics to obtain the influence of single optic perturbations on the stability of imaging systems.…”

Section: Introductionmentioning

confidence: 99%

Analysis of misaligned optics effects on beam pointing stability in dual-pass optical system

Li,

Chen,

Zhang

et al. 2024

Phys. Scr.

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The high-power laser device utilizes a multi-pass amplification system to achieve elevated power laser output. Laser beam is transmitted several times through the amplifier, and the pointing stability is a critical factor affecting the efficiency of the system. Any perturbation of the optics during laser transmission can cause misalignment and further lead to beam pointing errors. Laser beam propagation simulation was conducted using the ray tracing method. Equivalent experiment was performed using a laser with a wavelength of 532nm, and the centroid position data of the laser beam were collected to characterize the effect of the optics misalignment on laser pointing. A model evaluating the sensitivity of the optics was constructed, and the analysis of how various optics impact pointing accuracy was conducted. Results indicate that, a linear relationship exists between the misalignment of the optic and the pointing shift and angular deviation of the beam when a single optic is misaligned. If multiple optics are misaligned, the shift in centroid position of the laser beam can be calculated by adding up the shifts caused by each misaligned optic. Furthermore, the shift in the centroid position of the laser beam is the linear superposition of the misalignment of each optic.

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