Silicon is a leading candidate material
to replace carbon/graphite,
the commonly used anode material in lithium-ion batteries (LIBs),
because it has an 11 times higher theoretical specific capacity. However,
silicon anodes have two main issues, low electronic conductivity and
large volume expansion during cycling, and these issues present challenges
in the manufacture of mechanically stable high-electrochemical-performance
Si electrodes. Physical vapor deposition (PVD) is an alternative fabrication
process that can produce binderless compact Si thin films suitable
for microbatteries and thin flexible devices. Despite numerous studies
exploring the use of vacuum-based PVD silicon films, no definitive
information has been recorded correlating how changes in process parameters
affect the properties of the resulting deposited films and how this
influences anode performance in Li-ion batteries. In this work, process
parameters (i.e., deposition power and gas working pressure) were
altered for various Si film deposition trials. Electronic resistivity,
electrochemical impedance spectroscopy (EIS), cyclic voltammetry (CV),
residual film stress, X-ray diffraction (XRD), Raman spectroscopy,
Fourier transform infrared (FTIR) spectroscopy, and X-ray photoelectron
spectroscopy (XPS) measurements were performed for a thorough physico/chemico
analysis of the various films. This information was used to interpret
the differences in discharge capacity and capacity retention obtained
from the various Si anodes using galvanostatic charge/discharge cycling
from assembled coin cells. CV measurements were used to corroborate
performance outcomes, as well as to calculate Li-ion diffusion coefficients.