Abstract:SummaryReliability of microelectromechanical systems (MEMS) depends a.o. on time-dependent deformation such as creep and fatigue [1]. It is known from literature that this behavior is affected by size-effects: the interaction between microstructural length scales and dimensional length scales [2,3]. Not much research has focused on characterizing size-effects in time-dependent material behavior, specifically for free-standing thin films [3]. This study investigates size-effects caused by grain statistics in ti… Show more
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