Size Optimization of Nanoimprinted-Texture on Crystalline Silicon Solar Cell by Three Dimensional Simulation

Yoshinaga, Seiya; Ishikawa, Yasuaki; Araki, Shintaro; Yan-Sen, Jiang; Horita, M.; Uraoka, Yukiharu

doi:10.4229/eupvsec20142014-2av.3.35

29th European Photovoltaic Solar Energy Conference and Exhibition; 1053-1055 2014

DOI: 10.4229/eupvsec20142014-2av.3.35

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Size Optimization of Nanoimprinted-Texture on Crystalline Silicon Solar Cell by Three Dimensional Simulation

Seiya Yoshinaga¹,

Yasuaki Ishikawa²,

Shintaro Araki³

et al.

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Low surface reflectance by nanoimprinted texture with silicon-rich silicon nitride layer

Yoshinaga¹,

Ishikawa²,

Uraoka³

2017

J. Phys. D: Appl. Phys.

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Texture structure is usually fabricated on crystalline silicon (c-Si) solar cells to provide a low surface reflectance by an etching method such as alkali solution. In this study, we proposed nanoimprint lithography (NIL) as a fabrication process of the texture structure on the flat c-Si surface. The fabricated nanoimprinted texture which is a moth-eye structure by zinc oxide still has a high interface reflectance since the differences of the refractive index between the texture material and the c-Si substrate is large. We proposed an insertion of a Si-rich silicon nitride (SiN) layer between the texture and the substrate to solve this problem, and confirmed that the inserted Si-rich SiN shows remarkable benefits in terms of lowering the surface reflectance and providing a high carrier lifetime of the Si absorber, simultaneously.

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Low surface reflectance by nanoimprinted texture with silicon-rich silicon nitride layer

Yoshinaga¹,

Ishikawa²,

Uraoka³

2017

J. Phys. D: Appl. Phys.

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show abstract

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Size Optimization of Nanoimprinted-Texture on Crystalline Silicon Solar Cell by Three Dimensional Simulation

Cited by 1 publication

References 0 publications

Low surface reflectance by nanoimprinted texture with silicon-rich silicon nitride layer

Low surface reflectance by nanoimprinted texture with silicon-rich silicon nitride layer

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