Gain control and hysteresis compensation phase shifter were used to improve the proportion integration differentiation (PID) feed-back control in the experiment. Results showed that control precision, settling time and overshoot were improved and the control accuracy was 25 nm. Ruderman and Bertram (17) proposed the system-oriented dynamic model for MSMA actuators, and combined the dynamic model of second-order linear actuators with Preisach hysteresis nonlinearity model. The discrete model parameters were identified by using experimental data and effectiveness of this dynamic model was validated. Adaptive inverse hysteresis control method based on observer was implemented to improve the robustness of system (17). The effectiveness of the control method was proved by using experiment. Mao Chiang et al predigested the control rules by using sliding mode controller and fuzzy sliding surfaces. Experimental results showed that this method was more effective and the control precision was 0.25 nm (18,19).With the advantages of adaptive learning, associative memory, strong robustness and fault tolerance, radial basis function neural network (RBFNN) has the capacity to identify any nonlinear functions. The hidden layers' output is used to obtain a set of basic functions. The linear approach is achieved by linear combination of output layers of RBFNN. In this paper, the RBFNN hysteresis model of the MSMA actuators is proposed. First, RBFNN is used as activation function to establish an inverse model. Then, a feed-forward controller is proposed