2012 American Control Conference (ACC) 2012
DOI: 10.1109/acc.2012.6315559
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Sliding-mode tracking control of piezo-actuated nanopositioners

Abstract: In this paper we propose a robust control scheme for a piezo-actuated nanopositioner to track arbitrary references. The positioner is represented as a linear system preceded by hysteresis, which is modeled with a Prandtl-Ishlinskii (PI) operator. In order to reduce the hysteresis effect, an approximate operator is used as a feedforward compensator. A sliding mode controller is then used to mitigate the effect of inversion error. In existing work on sliding mode control of piezo-actuated systems, the coefficien… Show more

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Cited by 24 publications
(9 citation statements)
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“…In Tables I and II, we list more experimental results for the proposed method (Scheme 3) and compare them with servo-compensator methods presented in [8] and Sliding-Mode-Control (SMC) presented in [23] that are implemented in the same nanopositioner used in this work. There are two designs for the servo-compensator:…”
Section: B Experimental Resultsmentioning
confidence: 99%
“…In Tables I and II, we list more experimental results for the proposed method (Scheme 3) and compare them with servo-compensator methods presented in [8] and Sliding-Mode-Control (SMC) presented in [23] that are implemented in the same nanopositioner used in this work. There are two designs for the servo-compensator:…”
Section: B Experimental Resultsmentioning
confidence: 99%
“…In practice, the equivalent internal resistance R 0 is usually assumed as R 0 = 0 [23], [25], [26], [28], [30]. Therefore, the electromechanical dynamic model (8) and (9) can be reduced to…”
Section: A Dynamic Modelingmentioning
confidence: 99%
“…This also explains why the tracking errors with the PID control and PBSMC are almost equal. For quantitatively comparing differences of them, the following definition DF is introduced with the control signal of the PID controller as the reference 30) where v pid and v pbsmc represent the control signals with the PID control and PBSMC, respectively.…”
Section: B Experimental Studiesmentioning
confidence: 99%
“…An extended survey of nanopositioning control [22] provides, among others, an overview of existing control methods for compensating the hysteresis. In the latest works [23], [24] on nanopositioning, two different control methods are proposed, both using an inverse Prandtl-Ishlinskii feedforward compensator. Further, the modeling and control of SMAactuated systems have been explicitly reported in [25], [26], and [27].…”
Section: Introductionmentioning
confidence: 99%