“…tensile properties [28], creep behavior [29], low-cycle fatigue [30,31], residual stress [32], and fracture toughness [33,34]) of various materials (e.g., metals [35], glasses [36], metallic glasses [37], ceramics [7,38], polymers [39][40][41], piezoelectric materials [42][43][44][45], thin films [46][47][48][49], and composites [50]). Microscratch test is also an effective technique to investigate scratch resistance of material [51], the structural integrity of multilayer coatings [52], tribological behavior [53,54], contact-induced damage/cracking [55], scratch-induced buckling failure of silicon nitride ceramic films [56], and the scratch behavior of Ce-doped YAG (Yttrium aluminum garnet, Y3Al5O12) coatings [57].…”